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Works (7)

Fabrication of hierarchical sapphire nanostructures using ultrafast laser induced morphology change

Nanotechnology
2025-03-24 | Journal article
Contributors: Joshua Cheung; Kun-Chieh Chien; Peter Sokalski; Li Shi; Chih-Hao Chang
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Characterization of porosity in periodic 3D nanostructures using spectroscopic scatterometry

Journal of Vacuum Science & Technology B
2023-12-01 | Journal article
Contributors: Kwon Sang Lee; Kun-Chieh Chien; Barbara Groh; I-Te Chen; Michael Cullinan; Chih-Hao Chang
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In situ metrology of direct-write laser ablation using optical emission spectroscopy

Journal of Vacuum Science & Technology B
2023-12-01 | Journal article
Contributors: Briana Cuero; Kun-Chieh Chien; Chih-Hao Chang
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In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy

Journal of Vacuum Science & Technology B
2023-12-01 | Journal article
Contributors: Kun-Chieh Chien; Noah Graff; Dragan Djurdjanovic; Chih-Hao Chang
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Controlling the etch selectivity of silicon using low-RF power HBr reactive ion etching

Journal of Vacuum Science & Technology B
2022-12-01 | Journal article
Contributors: Kun-Chieh Chien; Chih-Hao Chang
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Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly

Journal of Vacuum Science & Technology B
2022-12-01 | Journal article
Contributors: Vijay Anirudh Premnath; I.-Te Chen; Kun-Chieh Chien; Chih-Hao Chang
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Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
2021-12-01 | Journal article
Contributors: Kun-Chieh Chien; Chih-Hao Chang; Dragan Djurdjanovic
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Peer review (1 review for 1 publication/grant)

Review activity for Journal of vacuum science and technology. (1)