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Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Micromachines
2021-10-30 | Journal article
Contributors: Qi Ding; Hongliang Wang; Hanqiang Zhang; Xiao Huang; Xiaolei Sun; Zhenjie Qin; Rui Ren; Jiajun Zhu; Changde He; Wendong Zhang
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