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Works (4)

Atomic Layer Annealing on Ultrathin SiNx Resistive Switching Layer for Low-Voltage Operation of Resistive Random Access Memory

ACS Applied Electronic Materials
2024-12-24 | Journal article
Contributors: Chen-Hsiang Ling; Yun-Hsuan Ku; Chun-Ho Chuang; Yu-Fang Chen; Chi-Lin Mo; Jing-Jong Shyue; Miin-Jang Chen
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Atomic layer engineering on resistive switching in sub-4 nm AlN resistive random access memory devices

Journal of Materials Chemistry C
2023 | Journal article
Contributors: Chen-Hsiang Ling; Chi-Lin Mo; Chun-Ho Chuang; Jing-Jong Shyue; Miin-Jang Chen
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Dielectric Constant Enhancement and Leakage Current Suppression of Metal–Insulator–Metal Capacitors by Atomic Layer Annealing and the Capping Layer Effect Prepared with a Low Thermal Budget

ACS Applied Electronic Materials
2023-05-23 | Journal article
Contributors: Chun-Yuan Wang; Hung-Chih Huang; Chun-Yi Chou; Hsing-Yang Chen; Chen-Hsiang Ling; Hsin-Chih Lin; Miin-Jang Chen
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Conformal atomic layer etching for Ge based on sacrificial oxide with higher Gibbs free energy of formation

Surfaces and Interfaces
2022-06 | Journal article
Contributors: Chen-Hsiang Ling; Chun-Yi Chou; Tsai-Fu Chung; Jing-Jong Shyue; Jer-Ren Yang; Miin-Jang Chen
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