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Activities

Employment (3)

Kyushu Institute of Technology: IIZUKA, FUKUOKA, JP

2018-04 to present | Associate Professor (Mechanical Science and Technology Division, Department of Intelligent and Control System)
Employment
Source: Self-asserted source
Panart Khajornrungruang

Kyushu Institute of Technology: IIZUKA, FUKUOKA, JP

2016-09 to 2018-03 | Associate Professor (Department of Mechanical Information Science and Technology)
Employment
Source: Self-asserted source
Panart Khajornrungruang

Kyushu Institute of Technology: IIZUKA-shi, FUKUOKA, JP

2005-04 to 2007-03 | Research Associate (Faculty of Computer Science and Systems Engineering)
Employment
Source: Self-asserted source
Panart Khajornrungruang

Education and qualifications (2)

Osaka University: Osaka, Suita-shi, JP

Doctor of Engineering (Department of Mechanical Engineering)
Qualification
Source: Self-asserted source
Panart Khajornrungruang

Osaka University: Osaka, JP

Bachelor of Engineering (Department of Mechanical Engineering)
Qualification
Source: Self-asserted source
Panart Khajornrungruang

Professional activities (6)

the Japan Society for Precision Engineering: Chiyoda-ku, Tokyo, JP

Membership
Source: Self-asserted source
Panart Khajornrungruang

Clarkson University: Potsdam, New York, US

2013-10-01 to 2014-03-27 | Visiting Research Associate Professor
Invited position
Source: Self-asserted source
Panart Khajornrungruang

Clarkson University: Potsdam, New York, US

2013-03-27 to 2013-09-30 | Research Associate Professor
Invited position
Source: Self-asserted source
Panart Khajornrungruang

公益社団法人 工作機械技術振興財団: Meguro-ku, Tokyo, JP

2013-06 | 第34次 奨励賞
Distinction
Source: Self-asserted source
Panart Khajornrungruang

公益社団法人 自動車技術会: Chiyoda-ku, Tokyo, JP

2005-03 | 2004年度 自動車技術会 大学院研究奨励賞
Distinction
Source: Self-asserted source
Panart Khajornrungruang

一般社団法人 型技術協会: Yokohama, JP

2003-06 | 第13回 型技術協会奨励賞
Distinction
Source: Self-asserted source
Panart Khajornrungruang

Funding (2)

Study on 3 Dimension Trajectory and Size Measurment of Each Operating Particle in Nano-Scale Processing Phenomena

2016-04 to 2019-03 | Grant
Japan Society for the Promotion of Science (Tokyo, KAKENHI, Grant-in-Aid for Scientific Research (C), JP)
Source: Self-asserted source
Panart Khajornrungruang

On-Machine Polishing Phenomena Observation Apparatus Development and Its Phenomenon Analysis

2013-04 to 2015-03 | Grant
Japan Society for the Promotion of Science (Tokyo, Grant-in-Aid for Young Scientists (B), JP)
Source: Self-asserted source
Panart Khajornrungruang

Works (43)

Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field

International Journal of Automation Technology
2024-01-05 | Journal article
Contributors: Thitipat Permpatdechakul; Panart Khajornrungruang; Keisuke Suzuki; Aran Blattler; Jiraphan Inthiam
Source: check_circle
Crossref

Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field

International Journal of Automation Technology
2023-07-05 | Journal article
Contributors: Thitipat Permpatdechakul; Panart Khajornrungruang; Keisuke Suzuki; Shotaro Kutomi
Source: check_circle
Crossref

Direct observation of removal of SiO2 nano-particles from silica surfaces: an evanescent field microscopy study and shear flow acting moment

Japanese Journal of Applied Physics
2023-07-01 | Journal article
Contributors: Yutaka Terayama; Panart Khajornrungruang; Keisuke Suzuki; Hibiki Fujishima; Satomi Hamada; Yutaka Wada; Hirokuni Hiyama
Source: check_circle
Crossref

Real Time Nanoscale Cleaning Phenomenon Observation During Enforcing MHz Wave By Evanescent Field

ECS Meeting Abstracts
2022-07-07 | Journal article
Contributors: Yutaka Terayama; Panart Khajornrungruang; Keisuke Suzuki; Ryotaro Mori; Satomi Hamada; Yutaka Wada; Hirokuni Hiyama
Source: check_circle
Crossref

Real Time Nanoscale Cleaning Phenomenon Observation During Enforcing MHz Wave By Evanescent Field

ECS Transactions
2022-05-20 | Journal article
Contributors: Yutaka Terayama; Panart Khajornrungruang; Keisuke Suzuki; Ryotaro Mori; Satomi Hamada; Yutaka Wada; Hirokuni Hiyama
Source: check_circle
Crossref

Real-Time Visualization of the Cleaning of Ceria Particles from Silicon Dioxide Films Using PVA Brush Scrubbing

ECS Journal of Solid State Science and Technology
2021-08-01 | Journal article
Contributors: C. K. Ranaweera; P. Khajornrungruang; S. Hamada; A. Gowda; H. Vegi; J. Seo; S. V. Babu
Source: check_circle
Crossref

3D trajectories and diffusion of single ceria particles near a glass surface and their removal

Journal of Materials Research
2021-01-15 | Journal article
Contributors: Jihoon Seo; Akshay Gowda; Panart Khajornrungruang; Satomi Hamada; S.V. Babu
Source: check_circle
Crossref

Trajectories, diffusion, and interactions of single ceria particles on a glass surface observed by evanescent wave microscopy

Journal of Materials Research
2020 | Journal article
EID:

2-s2.0-85078497905

Part of ISBN:

20445326 08842914

Contributors: Seo, J.; Gowda, A.; Khajornrungruang, P.; Hamada, S.; Song, T.; Babu, S.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

3D trajectories and diffusion of single ceria particles near a glass surface and their removal

Journal of Materials Research
2020-09-21 | Journal article
Contributors: Jihoon Seo; Akshay Gowda; Panart Khajornrungruang; Satomi Hamada; S.V. Babu
Source: check_circle
Crossref

High-speed three-dimensional tracking of individual 100 nm polystyrene standard particles in multi-wavelength evanescent fields

Measurement Science and Technology
2020-09-01 | Journal article
Contributors: Aran Blattler; Panart Khajornrungruang; Keisuke Suzuki; Thitipat Permpatdechakul
Source: check_circle
Crossref

Real time nanoscale cleaning phenomenon observation during PVA brush scrubbing by evanescent field

ECS Transactions
2019 | Conference paper
EID:

2-s2.0-85077135546

Part of ISBN:

19385862 19386737

Contributors: Terayama, Y.; Khajornrungruang, P.; Suzuki, K.; Kusatsu, K.; Hamada, S.; Wada, Y.; Hiyama, H.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on Relationship of the Material Removal Amount and the Increase in Abrasive Nanoparticle Size during Si-CMP

ESIT 2018 - 3rd International Conference on Engineering Science and Innovative Technology, Proceedings
2019 | Conference paper
EID:

2-s2.0-85064232763

Contributors: Boripatkosol, S.; Bun-Athuek, N.; Khajornrungruang, P.; Suzuki, K.; Chanthawong, N.; Phaisalpanumas, P.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Effects of mixed ultrafine colloidal silica particles on chemical mechanical polishing of sapphire

Japanese Journal of Applied Physics
2018 | Journal article
EID:

2-s2.0-85049376037

Part of ISBN:

13474065 00214922

Contributors: Bun-Athuek, N.; Takazaki, H.; Yoshimoto, Y.; Khajornrungruang, P.; Yasunaga, T.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on non-contact micro tool tip nano-position detection by means of evanescent field penetration depth

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
2018 | Conference paper
EID:

2-s2.0-85054532311

Contributors: Khajornrungruang, P.; Suzuki, K.; Inoue, T.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Analytical on mixed colloidal silica particle in slurry of sapphire chemical mechanical polishing

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
2017 | Conference paper
EID:

2-s2.0-85041279621

Contributors: Bun-Athuek, N.; Yoshimoto, Y.; Sakai, K.; Khajornrungruang, P.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

In situ measurement method for film thickness using transparency resin sheet with low refractive index under wet condition on chemical mechanical polishing

Japanese Journal of Applied Physics
2017 | Journal article
EID:

2-s2.0-85026222432

Part of ISBN:

13474065 00214922

Contributors: Oniki, T.; Khajornrungruang, P.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Micro tool diameter monitoring by means of laser diffraction for on-machine measurement

International Journal of Automation Technology
2017 | Journal article
EID:

2-s2.0-85028565760

Part of ISBN:

18838022 18817629

Contributors: Khajornrungruang, P.; Kimura, K.; Suzuki, K.; Inoue, T.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on effect of the surface variation of colloidal silica abrasive during chemical mechanical polishing of sapphire

Japanese Journal of Applied Physics
2017 | Journal article
EID:

2-s2.0-85026266521

Part of ISBN:

13474065 00214922

Contributors: Bun-Athuek, N.; Yoshimoto, Y.; Sakai, K.; Khajornrungruang, P.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Light scattering model for individual sub-100-nm particle size determination in an evanescent field

Japanese Journal of Applied Physics
2016 | Journal article
EID:

2-s2.0-85065706261

Part of ISBN:

13474065 00214922

Contributors: Khajornrungruang, P.; Korkmaz, S.; Angshuman, P.; Suzuki, K.; Kimura, K.; Babu, S.V.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Observation of the formation of anisotropic silver microstructures by evanescent wave and electron microscopy

Nanotechnology
2016 | Journal article
EID:

2-s2.0-84955503028

Part of ISBN:

13616528 09574484

Contributors: Pal, A.; Khajornrungruang, P.; Netzband, C.; Alety, S.; Babu, S.V.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on evaluation method for surface topography of polishing pad based on optical Fourier transform

2015 International Conference on Planarization/CMP Technology, ICPT 2015
2016 | Conference paper
EID:

2-s2.0-84964413075

Contributors: Suzuki, K.; Tajiri, T.; Khajornrungruang, P.; Mochizuki, Y.; Hiyama, H.; Matsuo, H.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale (2nd report: Proposal of 3D tracking method of single interacting nanoparticle)

2016 JSPE Spring Conference
2016-03-01 | Conference paper
Source: Self-asserted source
Panart Khajornrungruang

Non-contact micro cutting tool diameter measurement using laser diffraction

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
2015 | Conference paper
EID:

2-s2.0-84974624277

Contributors: Khajornrungruang, P.; Kimura, K.; Suzuki, H.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Real time imaging of the growth of silver ribbons by evanescent wave microscopy

RSC Advances
2015 | Journal article
EID:

2-s2.0-84940540121

Part of ISBN:

20462069

Contributors: Pal, A.; Khajornrungruang, P.; Babu, S.V.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on dynamic observation method for fine particles during Chemical Mechanical Polishing using optical transparency micro-patterned pad

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
2015 | Conference paper
EID:

2-s2.0-84974530730

Contributors: Oniki, T.; Khajornrungruang, P.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on evaluation method for polishing pad surface topography based on optical fourier transform

ICPT 2014 - Proceedings of International Conference on Planarization/CMP Technology 2014
2015 | Conference paper
EID:

2-s2.0-84925365818

Contributors: Khajornrungruang, P.; Suzuki, K.; Kushida, T.; Tajiri, T.; Matsuo, H.; Mochizuki, Y.; Hiyama, H.; Kimura, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on dynamic observation of sub-50 nm sized particles in water using evanescent field with a compact and mobile apparatus

Proceedings - ASPE 2014 Annual Meeting
2014 | Conference paper
EID:

2-s2.0-84923261283

Contributors: Khajornrungruang, P.; Dean, P.J.; Babu, S.V.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

High precision tool cutting edge monitoring using laser diffraction for on-machine measurement

International Journal of Automation Technology
2012 | Journal article
EID:

2-s2.0-84863240980

Part of ISBN:

18838022 18817629

Contributors: Khajornrungruang, P.; Kimura, K.; Takaya, Y.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

On-machine measurement of a distance between high speed rotation tool tip and workpiece by laser diffraction

Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
2012 | Conference paper
EID:

2-s2.0-84911437924

Contributors: Khajornrungruang, P.; Kimura, K.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Spatial fourier transform analysis of polishing pad surface topography

Japanese Journal of Applied Physics
2012 | Journal article
EID:

2-s2.0-84861502182

Part of ISBN:

00214922 13474065

Contributors: Khajornrungruang, P.; Kimura, K.; Okuzono, T.; Suzuki, K.; Kushida, T.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Evaluation method applying Fourier transform analysis for conditioned polishing pad surface topography

International Journal of Automation Technology
2011 | Journal article
EID:

2-s2.0-84862909298

Part of ISBN:

18817629 18838022

Contributors: Kimura, K.; Khajornrungruang, P.; Okuzono, T.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Investigation on slurry flow and temperature in polishing process of quartz glass substrate

International Journal of Automation Technology
2011 | Journal article
EID:

2-s2.0-84862924625

Part of ISBN:

18817629 18838022

Contributors: Khajornrungruang, P.; Wada, N.; Kimura, K.; Yui, R.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Slurry supplying method for large quartz glass substrate polishing

Japanese Journal of Applied Physics
2011 | Journal article
EID:

2-s2.0-79957514589

Part of ISBN:

00214922 13474065

Contributors: Khajornrungruang, P.; Kimura, K.; Yui, R.; Wada, N.; Suzuki, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Evaluation method for conditioned polishing pad surface topography applying Fourier transform analysis

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
2010 | Conference paper
EID:

2-s2.0-84871584472

Contributors: Kimura, K.; Khajornrungruang, P.; Okuzono, T.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Investigation on slurry flow and temperature in polishing process of quartz glass substrate

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
2010 | Conference paper
EID:

2-s2.0-84871556243

Contributors: Khajornrungruang, P.; Wada, N.; Yui, R.; Kimura, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Slurry supplying method for large quartz glass substrate polishing

Advanced Metallization Conference (AMC)
2010 | Conference paper
EID:

2-s2.0-79957654218

Part of ISBN:

15401766

Contributors: Khajornrungruang, P.; Yui, R.; Wada, N.; Suzuki, K.; Kimura, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on Sapphire Chemical Mechanical Polishing using mixed abrasive slurry with fullerenol

Advanced Metallization Conference (AMC)
2010 | Conference paper
EID:

2-s2.0-79957668547

Part of ISBN:

15401766

Contributors: Suzuki, K.; Saitou, T.; Korezawa, T.; Khajornrungruang, P.; Kimura, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

On-machine tool measurement of tool tip position using laser diffraction

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
2008 | Conference paper
EID:

2-s2.0-84908222613

Contributors: Khajornrungruang, P.; Kimura, K.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

On-machine cutting edge profile measurement for micro milling tool (2nd report, micro endmill (φ 300 μm) wear measurement and evaluation)

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
2006 | Journal article
EID:

2-s2.0-33748329393

Part of ISBN:

03875024

Contributors: Khajornrungruang, P.; Miyoshi, T.; Takaya, Y.; Harada, T.; Isago, S.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Study on groove pattern layout for slurry flow control in CMP process

Advanced Metallization Conference (AMC)
2006 | Conference paper
EID:

2-s2.0-33947218913

Part of ISBN:

15401766

Contributors: Kimura, K.; Nagayama, K.; Morishita, H.; Inatsu, Y.; Khajornrungruang, P.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

On-machine tool measurement for cutting-edge profile of micro endmill using laser diffraction

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century
2005 | Conference paper
EID:

2-s2.0-84883704912

Contributors: Khajornrungruang, P.; Miyoshi, T.; Takaya, Y.; Harada, T.; Isago, S.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

On-machine cutting edge profile measurement for micro milling tool (1st report, laser diffraction gauge method and its verifications)

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
2004 | Journal article
EID:

2-s2.0-15544383092

Part of ISBN:

03875024

Contributors: Khajornrungruang, P.; Miyoshi, T.; Takaya, Y.; Harada, T.; Isago, S.
Source: Self-asserted source
Panart Khajornrungruang via Scopus - Elsevier

Novel Edge Profile Measurement for Micro Cutting Tool by Laser Diffraction

the euspen International Topical Conference
2003-05 | Conference paper
Source: Self-asserted source
Panart Khajornrungruang