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Works (3)

A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

IEEE Journal of Solid-State Circuits
2020-09 | Journal article
DOI: 10.1109/JSSC.2020.2991533
Contributors: Yuki Furubayashi; Takashi Oshima; Taizo Yamawaki; Keiki Watanabe; Keijiro Mori; Naoki Mori; Akira Matsumoto; Yudai Kamada; Atsushi Isobe; Tomonori Sekiguchi
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Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers

IEEE Sensors Journal
2020-02-01 | Journal article
DOI: 10.1109/JSEN.2019.2948172
Contributors: Atsushi Isobe; Yudai Kamada; Chisaki Takubo; Yuki Furubayashi; Takashi Oshima; Noriyuki Sakuma; Tomonori Sekiguchi
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Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power

Journal of Microelectromechanical Systems
2019-06 | Journal article
DOI: 10.1109/JMEMS.2019.2903349
Contributors: Yudai Kamada; Atsushi Isobe; Takashi Oshima; Yuki Furubayashi; Tatemi Ido; Tomonori Sekiguchi
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