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XeF2 gas assisted focused electron beam induced etching of niobium thin films: towards direct write editing of niobium superconducting devices

Nanoscale Horizons
2025 | Journal article
Contributors: Spencer Gellerup; Reece Emery; Scott T. Retterer; Steven J. Randolph; Philip D. Rack
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Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Journal of Vacuum Science & Technology A
2023-09-01 | Journal article
Contributors: Spencer Gellerup; Corey L. Arnold; Christopher Muratore; Nicholas R. Glavin; Nigel D. Shepherd; Andrey A. Voevodin
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Morphological, compositional and phase evolutions in sulfur-rich W-S targets during magnetron sputtering

Vacuum
2023-07 | Journal article
Contributors: Spencer Gellerup; Corey L. Arnold; Euan Cairns; Christopher Muratore; Nicholas R. Glavin; Nigel D. Shepherd; Andrey A. Voevodin
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