Personal information

No personal information available

Activities

Collapse all

Works (3)

Investigation of the dual-frequency bias effect on inductively coupled Cl2 plasmas by hybrid simulation

Journal of Physics D: Applied Physics
2023-09-07 | Journal article
DOI: 10.1088/1361-6463/acdaa7
Contributors: Lei Tong; Ming-Liang Zhao; Yu-Ru Zhang; Yuan-Hong Song; You-Nian Wang
Source: check_circle
Crossref

Fast simulation of the E–H mode transition in Ar/O2 inductively coupled plasmas

Journal of Applied Physics
2023-07-21 | Journal article
DOI: 10.1063/5.0155954
Contributors: Ming-Liang Zhao; Lei Tong; Yu-Ru Zhang; Fei Gao; You-Nian Wang
Source: check_circle
Crossref

Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas

Physics of Plasmas
2021-05 | Journal article
DOI: 10.1063/5.0048522
Contributors: Lei Tong; Yu-Ru Zhang; Jia-Wei Huang; Ming-Liang Zhao; De-Qi Wen; Yuan-Hong Song; You-Nian Wang
Source: check_circle
Crossref
How many people are using ORCID?