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ResearcherID: A-8485-2013

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Works (1)

Plasma processing for advanced microelectronics beyond CMOS

Journal of Applied Physics
2021-08-28 | Journal article
DOI: 10.1063/5.0053666
Contributors: N. Marchack; L. Buzi; D. B. Farmer; H. Miyazoe; J. M. Papalia; H. Yan; G. Totir; S. U. Engelmann
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Peer review (4 reviews for 3 publications/grants)

Review activity for Journal of vacuum science and technology. (1)
Review activity for Materials science in semiconductor processing. (2)
Review activity for Microelectronic engineering. (1)
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