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Ruhr-Universität Bochum: Bochum, Nordrhein-Westfalen, DE

(Lehrstuhl für Laseranwendungstechnik)
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Ruhr-Universität Bochum

Works (14)

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2

Advanced Materials Interfaces
2024-12 | Journal article
DOI: 10.1002/admi.202400478
Contributors: Malte J. M. J. Becher; Jonas B. Ullrich; Julia Jagosz; Aleksander Kostka; Claudia Bock; Andreas Ostendorf; Evgeny L. Gurevich
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Crossref
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Wafer‐Scale Demonstration of Polycrystalline MoS2 Growth on 200 mm Glass and SiO2/Si Substrates by Plasma‐Enhanced Atomic Layer Deposition

Advanced Materials Technologies
2024-11 | Journal article
DOI: 10.1002/admt.202400492
Contributors: Julia Jagosz; Leander Willeke; Nils Gerke; Malte J. M. J. Becher; Paul Plate; Aleksander Kostka; Detlef Rogalla; Andreas Ostendorf; Claudia Bock
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Crossref
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Preferred source (of 3)‎

Post treatment of plasma enhanced atomic layer deposited MoS<sup>2 </sub>via ultra short pulse laser to increase the crystallinity

Laser + Photonics for Advanced Manufacturing
2024-06-20 | Conference paper | Author
DOI: 10.1117/12.3016372
SOURCE-WORK-ID: 395330
Part of SOURCE-WORK-ID: 395336
EID: 2-s2.0-85198911598
Part of ISBN: 9781510673298
Part of ISBN: 9781510673281
Contributors: Willeke, Leander; Claudia Bock; Andreas Ostendorf; Malte Becher
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Ruhr-Universität Bochum
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Großflächiges polykristallines Wachstum von Molybdändisulfid auf 200 mm Glaswafern für die Integration in einem 2D pH-Sensorsystem

MikroSystemTechnik Kongress 2023
2023 | Conference paper | Author
SOURCE-WORK-ID: 406242
Part of SOURCE-WORK-ID: 373607
EID: 2-s2.0-85196917727
Part of ISBN: 9783800762033
Part of ISBN: 380076203X
Part of ISBN: 9783800762040
Contributors: Jagosz, Julia; Leander Willeke; Malte Becher; Andreas Ostendorf; Claudia Bock
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Ruhr-Universität Bochum

Konzepte zur Reduktion des MoS2-Kontaktwiderstandes basierend auf großflächig gewachsenen PEALD-Filmen

MikroSystemTechnik Kongress 2023
2023 | Conference paper | Author
SOURCE-WORK-ID: 406241
Part of SOURCE-WORK-ID: 373607
EID: 2-s2.0-85196910209
Part of ISBN: 9783800762040
Part of ISBN: 9783800762033
Part of ISBN: 380076203X
Contributors: Leander Willeke; Malte Becher; Jagosz, Julia; Andreas Ostendorf; Claudia Bock; Schmitt, Nils
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Ruhr-Universität Bochum

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS2 Films

Advanced Engineering Materials
2023-11 | Journal article
DOI: 10.1002/adem.202300677
Contributors: Malte Jonas Marius Julian Becher; Julia Jagosz; Rahel-Manuela Neubieser; Jan-Lucas Wree; Anjana Devi; Marvin Michel; Claudia Bock; Evgeny L. Gurevich; Andreas Ostendorf
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Crossref
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Preferred source (of 2)‎

Ultrashort pulse laser phase transition of 2D MoS 2 produced by atomic layer deposition

2023-09-18 | Conference paper | Author
SOURCE-WORK-ID: 382231
Contributors: Malte Becher; Willeke, Leander; Wilken, Martin; Devi, Anjana; Claudia Bock; Andreas Ostendorf
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Ruhr-Universität Bochum

Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

Frontiers in nanotechnology
2023-07-17 | Journal article | Author
DOI: 10.3389/fnano.2023.1227025
SOURCE-WORK-ID: 365116
Part of SOURCE-WORK-ID: 365115
WOSUID: 001040700300001
EID: 2-s2.0-85166423071
Part of ISSN: 2673-3013
Contributors: Malte Becher; Jagosz, Julia; Claudia Bock; Andreas Ostendorf; Evgeny Gurevich
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Ruhr-Universität Bochum

Large-area deposition of thin crystalline MoS2 films on 200 mm wafers using plasma-assisted atomic layer deposition

Mikro-Nano-Integration
2022 | Conference paper | Author
SOURCE-WORK-ID: 352201
Part of SOURCE-WORK-ID: 352195
Part of ISBN: 9783800759903
Part of ISBN: 9783800759910
Contributors: Jagosz, Julia; Willeke, Leander; Malte Becher; Andreas Ostendorf; Bock, Claudia; Plate, Paul
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Ruhr-Universität Bochum

Low-temperature ALD process development of 200 mm wafer-scale MoS2 for gas sensing application

Micro and nano engineering
2022 | Journal article | Author
DOI: 10.1016/j.mne.2022.100126
SOURCE-WORK-ID: 311324
Part of SOURCE-WORK-ID: 311321
WOSUID: 000781652000003
EID: 2-s2.0-85126539829
Part of ISSN: 2590-0072
Contributors: Wree, Jan-Lucas; Jagosz, Julia; Malte Becher; Andreas Ostendorf; Devi, Anjana; Claudia Bock; Michel, M.; Grabmaier, A.; Neubieser, Rahel-Manuela
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Ruhr-Universität Bochum

Nucleation and growth studies of large-area deposited WS2 on flexible substrates

Materials Research Express
2022-11-01 | Journal article
DOI: 10.1088/2053-1591/ac9bd0
Contributors: Thomas Berning; Malte Becher; Jan-Lucas Wree; Julia Jagosz; Aleksander Kostka; Andreas Ostendorf; Anjana Devi; Claudia Bock
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Crossref
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Preferred source (of 2)‎

Ferromagnetic cobalt disulfide: a CVD pathway toward high-quality and phase-pure thin films

ACS applied electronic materials
2022-07-21 | Journal article | Author
DOI: 10.1021/acsaelm.2c00685
SOURCE-WORK-ID: 327544
Part of SOURCE-WORK-ID: 294472
WOSUID: 000832438100001
EID: 2-s2.0-85136548152
Part of ISSN: 2637-6113
Contributors: Wree, Jan-Lucas; David Zanders; Detlef Rogalla; Malte Becher; Andreas Ostendorf; Devi, Anjana; Glauber, Jean-Pierre; Griffiths, Matthew B. E.; Barry, Seán T.; Ney, Andreas
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Ruhr-Universität Bochum

Raman spectroscopy as an effective tool for characterizing large-area 2D TMDs deposited from the gas phase

MikroSystemTechnik Kongress 2021
2021 | Conference paper | Author
SOURCE-WORK-ID: 307818
Part of SOURCE-WORK-ID: 307817
EID: 2-s2.0-85125191220
Part of ISBN: 9783800756568
Contributors: Malte Becher; Wree, Jan-Lucas; Berning, Thomas; Bock, Claudia; Devi, Anjana; Andreas Ostendorf; Neubieser, Rahel-Manuela; Michel, Marvin D.
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Ruhr-Universität Bochum

Development of form-fit connection for NiTi shape memory wire actuators using laser processing

11th CIRP Conference on Photonic Technologies [LANE 2020]
2020-09-15 | Conference paper | Author
DOI: 10.1016/j.procir.2020.09.180
SOURCE-WORK-ID: 894
Part of SOURCE-WORK-ID: 3914
EID: 2-s2.0-85093356615
Contributors: Marvin Schuleit; Malte Becher; Maaß, Burkhard; Cemal Esen; Franke, Fabian
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Ruhr-Universität Bochum
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