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Works (3)

Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies

Journal of Vacuum Science & Technology A
2025-01-01 | Journal article
DOI: 10.1116/6.0004013
Contributors: Seung-Ho Seo; Donggeon Shin; Cha-Hee Kim; Keun-Tae Jeong; Yeongjong Lee; Daehyun Kim; Hyun Koock Shin; Won-Jun Lee
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Finite Element Analysis for Safe Design of a Flexible Microelectronic System under Bending Deformation

ECS Journal of Solid State Science and Technology
2022-04-01 | Journal article
DOI: 10.1149/2162-8777/ac67ae
Contributors: Cha-Hee Kim; Hyeonji Yun; Seung-Ho Seo; Byoung-Joon Kim; Jae-Hak Lee; Jun-Yeob Song; Won-Jun Lee
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Mechanical analysis of a flexible microelectronic system under twisting stress

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
2020-11-01 | Journal article
DOI: 10.1116/6.0000665
Contributors: Cha-Hee Kim; Jae-Min Kim; Seung-Ho Seo; Jae-Hak Lee; Jun-Yeob Song; Won-Jun Lee
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