Kaustubh Vyas (0000-0002-5534-1158)

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Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

Journal of Vacuum Science & Technology B

2023-01 | Journal article

DOI: 10.1116/6.0002167

Contributors: Kaustubh Vyas; Kashif M. Awan; Ksenia Dolgaleva

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Kaustubh Vyas

https://orcid.org/0000-0002-5534-1158

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Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices