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Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching

Journal of Microelectromechanical Systems
2022-06 | Journal article
DOI: 10.1109/JMEMS.2022.3154890
Contributors: Tao Zhao; Ming Zhuo; Xin Zhou; Xiang Xi; Xuezhong Wu; Dingbang Xiao
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