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Influence of Etching Trench on <inline-formula><math display="inline"><semantics><mrow><msubsup><mi>K</mi><mrow><mi>e</mi><mi>f</mi><mi>f</mi></mrow><mn>2</mn></msubsup></mrow></semantics></math></inline-formula>&nbsp;of Film Bulk Acoustic Resonator

Micromachines
2022-01 | Journal article | Author
DOI: 10.3390/mi13010102
Contributors: Chao Gao; yang zou; Jie Zhou; Yan Liu; WENJUAN LIU; Yao Cai; Chengliang Sun
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Multidisciplinary Digital Publishing Institute
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