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Other IDs

Scopus Author ID: 6602309165

Keywords

Micromachining Microfabrication Microtechnology Microengineering Micro Systems Engineering, Cleanroom Processing Nanofabrication Cleanroom Technology, Lithography Photolithography Thin Films and Nanotechnology Microsystem Technology, Nanoimprint Lithography Nanolithography Electron Beam Lithography Optical Photolitography, Carbon Films

Countries

Lithuania

Activities

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Employment (1)

Kaunas University of Technology: Kaunas, Lithuania, LT

1997-02-01 to 2023-12-12 | Chief Researcher (Institute of Materials Science)
Employment
Source: Self-asserted source
Viktoras Grigaliūnas

Education and qualifications (1)

Kaunas University of technology: Kaunas, Lithuania, LT

1994-09-01 to 1996-12-31 | PhD Student (Institute of Materials Science)
Education
Source: Self-asserted source
Viktoras Grigaliūnas

Funding (1)

Nanolithography for Ultraviolet Optics

Grant
Research council of Lithuania (Vilnius, Lithuania, LT)
Source: Self-asserted source
Viktoras Grigaliūnas

Works (50 of 60)

Items per page:
Page 1 of 2

Anti-Corrosion SiO<sub>x</sub>-Doped DLC Coating for Raster Steel Linear Scales

Coatings
2024-07 | Journal article | Author
DOI: 10.3390/coatings14070818
Contributors: Algirdas Lazauskas; Viktoras Grigaliūnas; Dalius Jucius; Šarūnas Meškinis; Mindaugas Andrulevicius; Asta Guobiene; Andrius Vasiliauskas; Albinas Kasparaitis
Source: check_circle
Multidisciplinary Digital Publishing Institute

Anti-fogging technique for protection of optical grating scales

Optical Materials
2023-08 | Journal article
DOI: 10.1016/j.optmat.2023.113998
Part of ISSN: 0925-3467
Contributors: Viktoras Grigaliūnas; Šarūnas Meškinis; Dalius Jucius; Algirdas Lazauskas; Mindaugas Andrulevicius; Asta Guobiene; Brigita Abakevičienė; Mindaugas Juodėnas; Rimantas Gudaitis; Vitoldas Kopustinskas et al.
Source: Self-asserted source
Viktoras Grigaliūnas
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Hydrophilic Surface Modification of Amorphous Hydrogenated Carbon Nanocomposite Films via Atmospheric Oxygen Plasma Treatment

Nanomaterials
2023-03-20 | Journal article
DOI: 10.3390/nano13061108
Part of ISSN: 2079-4991
Contributors: Algirdas Lazauskas; Mindaugas Andrulevicius; Brigita Abakevičienė; Dalius Jucius; Viktoras Grigaliūnas; Asta Guobiene; Šarūnas Meškinis
Source: Self-asserted source
Viktoras Grigaliūnas
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CF4/O2 inductively coupled plasma etching of silicate glass for antifogging applications

Optical Materials
2023-02 | Journal article
DOI: 10.1016/j.optmat.2023.113437
Part of ISSN: 0925-3467
Contributors: Dalius Jucius; Viktoras Grigaliūnas; Mindaugas Juodėnas; Asta Guobiene; Algirdas Lazauskas
Source: Self-asserted source
Viktoras Grigaliūnas
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Electrical Characterization of Thin PEDOT:PSS Films on Alumina and Thiol–Ene Substrates

Polymers
2021-10-13 | Journal article
DOI: 10.3390/polym13203519
Part of ISSN: 2073-4360
Contributors: Dalius Jucius; Rimantas Gudaitis; Algirdas Lazauskas; Viktoras Grigaliūnas
Source: Self-asserted source
Viktoras Grigaliūnas
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Hot Embossing of Micro-Pyramids into Thermoset Thiol-Ene Film

Polymers
2020-10-06 | Journal article
DOI: 10.3390/polym12102291
Part of ISSN: 2073-4360
Contributors: Dalius Jucius; Algirdas Lazauskas; Viktoras Grigaliūnas; Asta Guobiene; Linas Puodžiukynas
Source: Self-asserted source
Viktoras Grigaliūnas
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SiO2-Based Nanostructured Superhydrophobic Film with High Optical Transmittance

Coatings
2020-09-29 | Journal article
DOI: 10.3390/coatings10100934
Part of ISSN: 2079-6412
Contributors: Algirdas Lazauskas; Dalius Jucius; Linas Puodžiukynas; Asta Guobiene; Viktoras Grigaliūnas
Source: Self-asserted source
Viktoras Grigaliūnas
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Recovery Behavior of Microstructured Thiol-Ene Shape-Memory Film

Coatings
2019-04-20 | Journal article
DOI: 10.3390/coatings9040267
Part of ISSN: 2079-6412
Contributors: Algirdas Lazauskas; Viktoras Grigaliūnas; Dalius Jucius
Source: Self-asserted source
Viktoras Grigaliūnas
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Shape-Memory Assisted Scratch-Healing of Transparent Thiol-Ene Coatings

Materials
2019-02 | Journal article | Author
DOI: 10.3390/ma12030482
Contributors: Algirdas Lazauskas; Dalius Jucius; Valentinas Baltrušaitis; Rimantas Gudaitis; Igoris Prosyčevas; Brigita Abakevičienė; Asta Guobienė; Mindaugas Andrulevicius; Viktoras Grigaliūnas
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Multidisciplinary Digital Publishing Institute
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UV-NIL replication of microlens arrays on flexible fluoropolymer substrates

Microsystem Technologies
2017-06 | Journal article
DOI: 10.1007/s00542-017-3468-8
Part of ISSN: 0946-7076
Contributors: Dalius Jucius; Algirdas Lazauskas; Viktoras Grigaliūnas; Brigita Abakevičienė; Saulius Smetona; Sigitas Tamulevičius
Source: Self-asserted source
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Effects of 3D microlens transfer into fused silica substrate by CF 4 /O 2 dry etching

Applied Surface Science
2017-01 | Journal article
DOI: 10.1016/j.apsusc.2016.10.024
Part of ISSN: 0169-4332
Contributors: Viktoras Grigaliūnas; Dalius Jucius; Algirdas Lazauskas; Mindaugas Andrulevičius; Jolita Sakaliūnienė; Brigita Abakevičienė; Vitoldas Kopustinskas; Saulius Smetona; Sigitas Tamulevičius
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Nitrogen-doped twisted graphene grown on copper by atmospheric pressure CVD from a decane precursor

Beilstein Journal of Nanotechnology
2017-01 | Journal article
DOI: 10.3762/bjnano.8.15
Part of ISSN: 2190-4286
Contributors: Ivan V Komissarov; Nikolai G Kovalchuk; Vladimir A Labunov; Ksenia V Girel; Olga V Korolik; Mikhail S Tivanov; Algirdas Lazauskas; Mindaugas Andrulevičius; Tomas Tamulevičius; Viktoras Grigaliūnas et al.
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Plasmonic Properties of Nanostructured Diamond Like Carbon/Silver Nanocomposite Films with Nanohole Arrays

Materials Science
2016-11 | Journal article
DOI: 10.5755/j01.ms.22.4.13193
Part of ISSN: 2029-7289
Contributors: Šarūnas MEŠKINIS; Iryna YAREMCHUK; Viktoras GRIGALIŪNAS; Andrius VASILIAUSKAS; Arvydas ČIEGIS
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Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique

Microelectronic Engineering
2016-10 | Journal article
DOI: 10.1016/j.mee.2016.07.003
Part of ISSN: 0167-9317
Contributors: Viktoras Grigaliūnas; Algirdas Lazauskas; Dalius Jucius; Darius Viržonis; Brigita Abakevičienė; Saulius Smetona; Sigitas Tamulevičius
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Vibration Based Microstructure Replication and Analysis

Nanomaterials for Security
2016-07 | Other
DOI: 10.1007/978-94-017-7593-9_13
Part of ISSN: 1874-6489
Contributors: R. Šakalys; G. Janušas; A. Palevičius; V. Grigaliūnas; P. Palevičius
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Effect of fused silica surface wettability on thermal reflow of polymer microlens arrays

Microsystem Technologies
2016-05 | Journal article
DOI: 10.1007/s00542-016-2975-3
Part of ISSN: 0946-7076
Contributors: D. Jucius; V. Grigaliūnas; A. Lazauskas; E. Sapeliauskas; B. Abakevičienė; S. Smetona; S. Tamulevičius
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Development of complex 3D microstructures based on computer generated holography and their usage for biomedical applications

Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2016
2016-04 | Other
DOI: 10.1117/12.2218848
Contributors: Arvydas Palevicius; Viktoras Grigaliunas; Giedrius Janusas; Paulius Palevicius; Rokas Sakalys; Vijay K. Varadan
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Highly hydrophilic poly(ethylene terephthalate) films prepared by combined hot embossing and plasma treatment techniques

Applied Surface Science
2015-09 | Journal article
DOI: 10.1016/j.apsusc.2015.04.221
Part of ISSN: 0169-4332
Contributors: D. Jucius; V. Kopustinskas; V. Grigaliūnas; A. Guobienė; A. Lazauskas; M. Andrulevičius
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Characterization of linear alkyl phosphonate self-assembled on perovskite substrate

Applied Surface Science
2015-07 | Journal article
DOI: 10.1016/j.apsusc.2015.03.109
Part of ISSN: 0169-4332
Contributors: A. Lazauskas; J. Baltrusaitis; V. Grigaliūnas; I. Prosyčevas
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Thermally-driven structural changes of graphene oxide multilayer films deposited on glass substrate

Superlattices and Microstructures
2014-11 | Journal article
DOI: 10.1016/j.spmi.2014.08.006
Part of ISSN: 0749-6036
Contributors: A. Lazauskas; J. Baltrusaitis; V. Grigaliūnas; A. Guobienė; I. Prosyčevas; P. Narmontas; B. Abakevičienė; S. Tamulevičius
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Modelling and Fabrication of Micro-SOFC Membrane Structure

Materials Science
2014-06 | Journal article
DOI: 10.5755/j01.ms.20.2.5585
Part of ISSN: 2029-7289
Contributors: Brigita ABAKEVIČIENĖ; Viktoras GRIGALIŪNAS; Jolita SAKALIŪNIENĖ; Dainius VIRGANAVIČIUS; Kęstutis ŠLAPIKAS; Marius MIKOLAJŪNAS; Sigitas TAMULEVIČIUS
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UV imprint fabrication of polymeric scales for optical rotary encoders

Optics & Laser Technology
2014-03 | Journal article
DOI: 10.1016/j.optlastec.2013.07.020
Part of ISSN: 0030-3992
Contributors: D. Jucius; I. Grybas; V. Grigaliūnas; M. Mikolajūnas; A. Lazauskas
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Characterization of Plasma Polymerized Hexamethyldisiloxane Films Prepared by Arc Discharge

Plasma Chemistry and Plasma Processing
2013 | Journal article
DOI: 10.1007/s11090-013-9516-y
Part of ISSN: 0272-4324
Contributors: Algirdas Lazauskas; Jonas Baltrusaitis; Viktoras Grigaliūnas; Dalius Jucius; Asta Guobienė; Igoris Prosyčevas; Pranas Narmontas
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Tribological properties of the two-step thermally deposited chromium films

Applied Surface Science
2013-10 | Journal article
DOI: 10.1016/j.apsusc.2013.07.083
Part of ISSN: 0169-4332
Contributors: A. Lazauskas; J. Baltrusaitis; V. Grigaliūnas; A. Baltušnikas; B. Abakevičienė; T. Polcar
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Water droplet behavior on superhydrophobic SiO2 nanocomposite films during icing/deicing cycles

Materials Characterization
2013-08 | Journal article
DOI: 10.1016/j.matchar.2013.04.017
Part of ISSN: 1044-5803
Contributors: A. Lazauskas; A. Guobienė; I. Prosyčevas; V. Baltrušaitis; V. Grigaliūnas; P. Narmontas; J. Baltrusaitis
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Polyvinylpyrrolidone surface modification with SiOx containing amorphous hydrogenated carbon (a-C:H/SiOx) and nitrogen-doped a-C:H/SiOx films using Hall-type closed drift ion beam source

Thin Solid Films
2013-07 | Journal article
DOI: 10.1016/j.tsf.2012.11.109
Part of ISSN: 0040-6090
Contributors: A. Lazauskas; V. Grigaliunas; A. Guobienė; J. Puišo; I. Prosyčevas; J. Baltrusaitis
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Surface morphology, cohesive and adhesive properties of amorphous hydrogenated carbon nanocomposite films

Applied Surface Science
2013-07 | Journal article
DOI: 10.1016/j.apsusc.2013.03.131
Part of ISSN: 0169-4332
Contributors: A. Lazauskas; V. Grigaliūnas; Š. Meškinis; F. Ecarla; J. Baltrusaitis
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Two-step Fabrication of Large Area SiO2/Si Membranes

Materials Science
2012 | Journal article
DOI: 10.5755/j01.ms.18.4.3090
Part of ISSN: 1392-1320
Contributors: Viktoras GRIGALIŪNAS; Brigita ABAKEVIČIENĖ; Ignas GRYBAS; Angelė GUDONYTĖ; Vitoldas KOPUSTINSKAS; Darius VIRŽONIS; Ramūnas NAUJOKAITIS; Sigitas TAMULEVIČIUS
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Wettability and optical properties of O2 and CF4 plasma treated biaxially oriented semicrystalline poly(ethylene terephthalate) films

Applied Surface Science
2012 | Journal article
DOI: 10.1016/j.apsusc.2012.09.149
Part of ISSN: 0169-4332
Contributors: D. Jucius; V. Grigaliūnas; V. Kopustinskas; A. Lazauskas; A. Guobienė
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A comparative evaluation of surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films on glass substrates

Applied Surface Science
2012-07 | Journal article
DOI: 10.1016/j.apsusc.2012.04.106
Part of ISSN: 0169-4332
Contributors: A. Lazauskas; V. Grigaliūnas; F. Ecarla; M. Caunii
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Atomic force microscopy and X-ray photoelectron spectroscopy evaluation of adhesion and nanostructure of thin Cr films

Thin Solid Films
2012-07 | Journal article
DOI: 10.1016/j.tsf.2012.05.065
Part of ISSN: 0040-6090
Contributors: A. Lazauskas; V. Grigaliūnas; A. Guobienė; M. Andrulevičius; J. Baltrusaitis
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Float Glass Surface Preparation Methods for Improved Chromium Film Adhesive Bonding

Materials Science
2012-06 | Journal article
DOI: 10.5755/j01.ms.18.2.1924
Part of ISSN: 1392-1320
Contributors: Algirdas LAZAUSKAS; Viktoras GRIGALIŪNAS
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Paviršiaus inžinerija ir nanotechnologijos

2012-05 | Book
DOI: 10.5755/e01.9786090204399
Contributors: Jonas Vilys; Sigitas Tamulevičius; Viktoras Grigaliūnas; Šarūnas Meškinis; Asta Guobienė
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Micro-channel drilling of Ni and Pt films on silicon by using laser beam interference ablation for solid oxide fuel cells

Smart Nano-Micro Materials and Devices
2011 | Other
DOI: 10.1117/12.910247
Contributors: Mindaugas Gedvilas; Bogdan Voisiat; Simonas Indrišiūnas; Mindaugas Maciulevičius; Sigitas Tamulevičius; Brigita Abakevičienė; Viktoras Grigaliūnas; Gediminas Račiukaitis; Saulius Juodkazis; Min Gu
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Hot embossing of PTFE: Towards superhydrophobic surfaces

Applied Surface Science
2011-01 | Journal article
DOI: 10.1016/j.apsusc.2010.09.102
Part of ISSN: 0169-4332
Contributors: D. Jucius; V. Grigaliūnas; M. Mikolajūnas; A. Guobienė; V. Kopustinskas; A. Gudonytė; P. Narmontas
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E-beam lithography of computer generated holograms using a fully vectorial 3D beam propagation method

Microelectronic Engineering
2010-11 | Journal article
DOI: 10.1016/j.mee.2010.04.001
Part of ISSN: 0167-9317
Contributors: Raimondas Petruškevičius; Jonas Baltrusaitis; Darius Kezys; Marius Mikolajūnas; Viktoras Grigaliūnas; Darius Viržonis
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Surface texturing of polytetrafluoroethylene by hot embossing

Applied Surface Science
2010-01 | Journal article
DOI: 10.1016/j.apsusc.2009.09.067
Part of ISSN: 0169-4332
Contributors: D. Jucius; A. Guobienė; V. Grigaliūnas
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Plasma etching of virtually stress-free stacked silicon nitride films

Thin Solid Films
2009-08 | Journal article
DOI: 10.1016/j.tsf.2009.03.183
Part of ISSN: 0040-6090
Contributors: M. Mikolajūnas; J. Baltrušaitis; V. Kopustinskas; G. Vanagas; V. Grigaliūnas; D. Viržonis
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Synthesis of sub-wavelength diffractive optical elements by 3D full-vectorial beam propagation method

2009 11th International Conference on Transparent Optical Networks
2009-06 | Other
DOI: 10.1109/icton.2009.5185283
Contributors: Raimondas Petruskevicius; Darius Kezys; Marius Mikolajunas; Viktoras Grigaliunas; Jonas Baltrusaitis; Darius Virzonis
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A study of stacked PECVD silicon nitride films used for surface micromachined membranes

Thin Solid Films
2008-10 | Journal article
DOI: 10.1016/j.tsf.2008.06.063
Part of ISSN: 0040-6090
Contributors: M. Mikolajūnas; R. Kaliasas; M. Andrulevičius; V. Grigaliūnas; J. Baltrušaitis; D. Viržonis
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Effects of selenium treatment on composition and photoluminescence properties of porous silicon

Journal of Luminescence
2007 | Journal article
DOI: 10.1016/j.jlumin.2007.02.039
Part of ISSN: 0022-2313
Contributors: R. Jarimavičiūtė-Žvalionienė; S. Tamulevičius; M. Andrulevičius; G. Statkutė; R. Tomašiūnas; V. Grigaliūnas
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Nanoimprint lithography using IR laser irradiation

Applied Surface Science
2006-11 | Journal article
DOI: 10.1016/j.apsusc.2005.12.166
Part of ISSN: 0169-4332
Contributors: V. Grigaliūnas; S. Tamulevičius; M. Muehlberger; D. Jucius; A. Guobienė; V. Kopustinskas; A. Gudonytė
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Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Thin Solid Films
2006-10 | Journal article
DOI: 10.1016/j.tsf.2005.12.223
Part of ISSN: 0040-6090
Contributors: Š. Meškinis; V. Kopustinskas; K. Šlapikas; S. Tamulevičius; A. Guobienë; R. Gudaitis; V. Grigaliūnas
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Analysis of a Microelectrostatic Motor

Solid State Phenomena
2006-06 | Other
DOI: 10.4028/3-908451-21-3.185
Part of ISSN: 1012-0394
Contributors: Vytautas Ostaševičius; Vytautas Bagdonas; Sigitas Tamulevičius; V. Grigaliūnas
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Analysis of a Microelectrostatic Motor

Solid State Phenomena
2006-06 | Journal article
DOI: 10.4028/www.scientific.net/ssp.113.185
Part of ISSN: 1662-9779
Contributors: Vytautas Ostaševičius; Vytautas Bagdonas; Sigitas Tamulevičius; V. Grigaliūnas
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Thermal stress kinetics in the microresist-silicon system

Emerging Lithographic Technologies X
2006-03-10 | Other
DOI: 10.1117/12.659952
Contributors: S. Tamulevicius; V. Grigaliunas; D. Jucius; V. Ostasevicius; A. Palevicius; G. Janusas; Michael J. Lercel
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Design, fabrication, and simulation of cantilever-type electrostatic micromechanical switch

Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
2005-05 | Other
DOI: 10.1117/12.599111
Contributors: Vytautas Ostasevicius; Rolanas Dauksevicius; Sigitas Tamulevicius; Algimantas Bubulis; Viktoras Grigaliunas; Arvydas Palevicius; Vijay K. Varadan
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Optically variable imaging using nanoimprint technique

Applied Surface Science
2005-05 | Journal article
DOI: 10.1016/j.apsusc.2004.10.015
Part of ISSN: 0169-4332
Contributors: V. Grigaliūnas; D. Jucius; S. Tamulevičius; A. Guobienė; V. Kopustinskas
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Laser pulse assisted nanoimprint lithography

Thin Solid Films
2004-04 | Journal article
DOI: 10.1016/j.tsf.2003.11.071
Part of ISSN: 0040-6090
Contributors: V. Grigaliūnas; S. Tamulevičius; R. Tomašiūnas; V. Kopustinskas; A. Guobien≐; D. Jucius
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Rapid evaluation of imprint quality using optical scatterometry

Microelectronic Engineering
2004-02 | Journal article
DOI: 10.1016/j.mee.2003.10.006
Part of ISSN: 0167-9317
Contributors: D. Jucius; V. Grigaliūnas; A. Guobien≐
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