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Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr:HfO2 Ferroelectric Capacitor

Sensors
2022-05-27 | Journal article
Contributors: Yejoo Choi; Changwoo Han; Jaemin Shin; Seungjun Moon; Jinhong Min; Hyeonjung Park; Deokjoon Eom; Jehoon Lee; Changhwan Shin
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