Personal information

Activities

Employment (2)

Shanghai Institute of Microsystem and Information Technology: Shanghai, CN

2018-10 to present | Professor (State Key Laboratory of Transducer Technology)
Employment
Source: Self-asserted source
Zhenyu Wu

Robert Bosch (Germany): Stuttgart, DE

2011-02 to 2018-10 | Senior Engineer / Project Leader (Engineering Center for Sensor Technology, Automotive Electronics Division)
Employment
Source: Self-asserted source
Zhenyu Wu

Education and qualifications (3)

Universität Ulm: Ulm, DE

2006-12 to 2011-01 | Doctor of Engineering (School of Engineering and Computer Sciences )
Education
Source: Self-asserted source
Zhenyu Wu

Universität Ulm: Ulm, DE

2004-10 to 2006-11 | Master of Science (Advanced Materials )
Education
Source: Self-asserted source
Zhenyu Wu

Shandong University: Jinan, CN

2000-09 to 2004-07 | Bacholer of Science (School of Physics and Microelectronics)
Education
Source: Self-asserted source
Zhenyu Wu

Works (39)

Microfabricated Active Laser Noise Suppression Device for a High-Sensitivity Diamond Quantum Magnetometer

ACS Photonics
2025-01-18 | Journal article
Part of ISSN: 2330-4022
Part of ISSN: 2330-4022
Contributors: wang nan; Yichen Liu; Yongquan Su; Xiao Peng; Yuqiang Hu; Qihui Liu; Fei Xie; Yaochen Zhu; Xin Chen; Xin Luo et al.
Source: Self-asserted source
Zhenyu Wu

MEMS fast steering mirror with a large optical aperture and high surface quality for free-space optical communication

Optics Express
2024-10-21 | Journal article | Author
Part of ISSN: 1094-4087
Contributors: Yi Yang; Yichen Liu; Yongquan Su; Zhichao Weng; Qianying Sun; Qifeng Qiao; Wenli Xue; wang yang; Yang Wang; Lihao Wang et al.
Source: Self-asserted source
Zhenyu Wu

Determination of Crosstalk in a Dual-Axis Piezoelectric MEMS Mirror and Suppression With Feedforward Algorithms

IEEE Sensors Journal
2024-10-15 | Journal article
Contributors: Anna Li; Hao Huang; Pengcheng Zhang; Yongquan Su; Yonggui Zhang; Lihao Wang; Yichen Liu; Yang Wang; Zhenyu Wu
Source: check_circle
Crossref

Fiber‐Integrated Diamond Quantum Sensor for High‐Voltage Current Measurements

Advanced Sensor Research
2024-10-07 | Journal article
Part of ISSN: 2751-1219
Part of ISSN: 2751-1219
Contributors: Qihui Liu; Shaoxiong Nie; Xiao Peng; Yaochen Zhu; Nan Wang; Yuqiang Hu; Xin Luo; Chun li; Maoheng Jing; Chunji Zhang et al.
Source: Self-asserted source
Zhenyu Wu

MEMS Fabry-Perot sensor for accurate high pressure measurement up to 10 MPa

Optics Express
2024-10-07 | Journal article | Author
Part of ISSN: 1094-4087
Contributors: Yuqiang Hu; Lu Cao; Shaoxiong Nie; Qihui Liu; Fei Xie; Xiao Peng; Yaochen Zhu; Jiachen Han; Xin Chen; Lihao Wang et al.
Source: Self-asserted source
Zhenyu Wu

A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

Sensors and Actuators A: Physical
2024-10-01 | Journal article
Part of ISSN: 0924-4247
Contributors: Yongquan Su; Yichen Liu; Yang Wang; Qianying Sun; Qifeng Qiao; Zhichao Weng; Lihao Wang; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability

Sensors and Actuators A: Physical
2024-10-01 | Journal article
Part of ISSN: 0924-4247
Contributors: Weihong Zhu; Yongquan Su; Shiyuan Gao; Xiaodong Li; Yonggui Zhang; Lihao Wang; Yichen Liu; Yang Wang; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication

Free-Space Laser Communications XXXVI
2024-03-12 | Conference paper
Contributors: Yang Wang; Cheng Zhang; WeiHong Zhu; YongGui Zhang; LiHao Wang; Yichen Liu; Yi Yang; AnNa Li; ZhenYu Wu
Source: Self-asserted source
Zhenyu Wu

Water-Immersible MEMS Mirror with a Large Optical Aperture

Micromachines
2024-02-02 | Journal article
Contributors: Yi Yang; Yichen Liu; Yongquan Su; Yang Wang; Yonggui Zhang; Hao Chen; Lihao Wang; Zhenyu Wu
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

A MEMS Fast Steering Mirror with 10 mm Aperture for Free-Space Optical Communication

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
2024-01-21 | Conference paper
Contributors: Yichen Liu; Yongquan Su; Zhichao Weng; Yi Yang; Yang Wang; Lihao Wang; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Biaxial Lissajous Scanning Piezoelectric MEMS Mirror Based on High Fill Factor and Large Optical Aperture

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
2024-01-21 | Conference paper
Contributors: Hao Huang; Lihao Wang; Yang Wang; Yichen Liu; Yongquan Su; Weihong Zhu; Yonggui Zhang; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Miniaturized Diamond Quantum Magnetometer with Integrated Laser Source and All Electrical I/OS

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
2024-01-21 | Conference paper
Contributors: Fei Xie; Zhichao Chen; Xiao Peng; Qihui Liu; Lingyun Li; Nan Wang; Yuqiang Hu; Yichen Liu; Lihao Wang; Hao Chen et al.
Source: Self-asserted source
Zhenyu Wu

Closed-loop Diamond Quantum Sensor for Large Range and High Precision Current Measurement

IEEE Sensors Journal
2024-01-05 | Journal article | Author
Part of ISSN: 1530-437X
Part of ISSN: 1558-1748
Part of ISSN: 2379-9153
Contributors: Qihui Liu; Fei Xie; Xiao Peng; Yonggui Zhang; Nan Wang; Yuqiang Hu; Lihao Wang; Yichen Liu; Yang Wang; Shaoxiong Nie et al.
Source: Self-asserted source
Zhenyu Wu

High-Q adiabatic micro-resonators on a wafer-scale ion-sliced 4H-silicon carbide-on-insulator platform

Optics Letters
2023-12-01 | Journal article
Contributors: Liping Zhou; Ailun Yi; Yongquan Su; Bingcheng Yang; Yifan Zhu; Jiachen Cai; Chengli Wang; Zhenyu Wu; Sannian Song; Jiaxiang Zhang et al.
Source: check_circle
Crossref

卫星激光通信MEMS快速反射镜可靠性研究进展

红外与激光工程
2023-09-30 | Journal article
Contributors: 朱伟鸿; 汪洋; 王栎皓; 刘艺晨; 武震宇
Source: Self-asserted source
Zhenyu Wu

Millimeter‐Scale Temperature Self‐Calibrated Diamond‐Based Quantum Sensor for High‐Precision Current Sensing

Advanced Quantum Technologies
2023-09-21 | Journal article
Part of ISSN: 2511-9044
Part of ISSN: 2511-9044
Contributors: Qihui Liu; Fei Xie; Xiao Peng; Yuqiang Hu; Nan Wang; Yonggui Zhang; Yang Wang; Lingyun Li; Hao Chen; Jiangong Cheng et al.
Source: Self-asserted source
Zhenyu Wu

Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

IEEE Access
2023-09-01 | Journal article | Author
Part of ISSN: 2169-3536
Contributors: Zihao Yu; Wang Lihao; yang wang; Zhang Yonggui; Liu Yichen; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Current Sensing Based on Microfabricated Diamond Quantum Magnetometer

2023-06-25 | Conference paper
Contributors: Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Fabrication and Characterization of a Novel Piezoelectric MEMS Mirror with High Fill Factor and High Speed

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2023-06-25 | Conference paper
Contributors: Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

On-Line Laser Power Measurement Based on Microfabricated Sensor Device

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2023-06-25 | Conference paper
Contributors: Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Sensors
2023-01-22 | Journal article
Part of ISSN: 1424-8220
Contributors: 朔 陈; Liuhaodong Feng; Song Guo; Yucheng Ji; Shuwen Zeng; Xinlin Peng; Yang Xu; Tianbao Hu; Zhenyu Wu; Shinan Wang
Source: Self-asserted source
Zhenyu Wu

Microfabricated sensor device for CW and pulsed laser power measurements

Optics Express
2023-01-16 | Journal article
Contributors: Yuqiang Hu; Fei Xie; Qihui Liu; Nan Wang; Jin Zhang; Yichen Liu; Yongquan Su; Yang Wang; Hao Chen; Zhenyu Wu
Source: check_circle
Crossref

Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors

Optics Express
2023-01-16 | Journal article
Contributors: Yuyao Zhang; Yichen Liu; Lihao Wang; Yongquan Su; Yonggui Zhang; Zihao Yu; Weihong Zhu; Yang Wang; Zhenyu Wu
Source: check_circle
Crossref

A Microfabricated Diamond Quantum Magnetometer with Picotesla Scale Sensitivity

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
2023-01-15 | Conference paper
Contributors: Fei Xie; Qihui Liu; Yuqiang Hu; Lingyun Li; Zhichao Chen; Jin Zhang; Yonggui Zhang; Yuyao Zhang; Yang Wang; Jiangong Cheng et al.
Source: Self-asserted source
Zhenyu Wu

A two-step wet etching process of PZT thin film with ultra-low undercut for MEMS applications

Sensors and Actuators A: Physical
2023-01-01 | Journal article
Part of ISSN: 0924-4247
Contributors: Yongquan Su; Yichen Liu; Yue Fei; Lihao Wang; Jindong Cai; Siqi Chen; Zhenyu Wu
Source: Self-asserted source
Zhenyu Wu

Realization of high-dynamic-range broadband magnetic-field sensing with ensemble nitrogen-vacancy centers in diamond

Review of Scientific Instruments
2023-01-01 | Journal article | Author
Part of ISSN: 0034-6748
Part of ISSN: 1089-7623
Contributors: Cao Wang; Qihui Liu; Yuqiang Hu; Fei Xie; Krishangi Krishna; wang nan; Lihao Wang; wang yang; Kimani Toussaint; Jiangong Cheng et al.
Source: Self-asserted source
Zhenyu Wu

The enhanced X-ray Timing and Polarimetry mission – eXTP: an update on its scientific cases, mission profile and development status

Proceedings of SPIE - The International Society for Optical Engineering
2022 | Conference paper
EID:

2-s2.0-85140430051

Part of ISSN: 1996756X 0277786X
Contributors: Zhang, S.-N.; Santangelo, A.; Xu, Y.; Feroci, M.; Hernanz, M.; Lu, F.; Chen, Y.; Feng, H.; Nandra, K.; Jiang, W. et al.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier

Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application

Micromachines
2022-12-30 | Journal article | Author
Part of ISSN: 2072-666X
Contributors: 刘昊东 冯; Shuwen Zeng; Yongquan Su; Lihao Wang; Yang Xu; Song Guo; Shuo Chen; Yucheng Ji; Xinlin Peng; Zhenyu Wu et al.
Source: Self-asserted source
Zhenyu Wu
grade
Preferred source (of 3)‎

基于金刚石量子色心的温度磁场同步测量技术

微纳电子技术
2022-11-30 | Journal article
Contributors: 王曹; 刘启慧; 程建功; 陈浩; 武震宇
Source: Self-asserted source
Zhenyu Wu

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Micromachines
2022-09-18 | Journal article
Contributors: Yichen Liu; Lihao Wang; Yongquan Su; Yuyao Zhang; Yang Wang; Zhenyu Wu
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

卫星激光通信快速反射镜研究进展及发展趋势

激光与光电子学进展
2022-07-26 | Journal article
Contributors: 余子昊; 王栎皓; 汪洋; 刘艺晨; 武震宇
Source: Self-asserted source
Zhenyu Wu

A microfabricated fiber-integrated diamond magnetometer with ensemble nitrogen-vacancy centers

Applied Physics Letters
2022-05-09 | Journal article
Part of ISSN: 0003-6951
Part of ISSN: 1077-3118
Source: Self-asserted source
Zhenyu Wu

Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films

Micromachines
2022-04-07 | Journal article
Part of ISSN: 2072-666X
Source: Self-asserted source
Zhenyu Wu
grade
Preferred source (of 3)‎

用于钻石磁传感器量子态操控的微波谐振器

功能材料与器件学报
2021-06 | Journal article
Contributors: 刘启慧; 汪洋; 李凌云; 武震宇
Source: Self-asserted source
Zhenyu Wu

Magnetic, multilayered nanotubes of low aspect ratios for liquid suspensions

Advanced Functional Materials
2011 | Journal article
EID:

2-s2.0-78650706323

Part of ISSN: 1616301X 16163028
Contributors: Zierold, R.; Wu, Z.; Biskupek, J.; Kaiser, U.; Bachmann, J.; Krill III, C.E.; Nielsch, K.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier

Synthesis of silver/poly(2-hydroxyethyl methacrylate) particles via a combination of inverse miniemulsion and silver ion reduction in a "nanoreactor"

Langmuir
2011 | Journal article
EID:

2-s2.0-80051543411

Part of ISSN: 07437463 15205827
Contributors: Cao, Z.; Walter, C.; Landfester, K.; Wu, Z.; Ziener, U.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier

Enhancing the magnetoviscosity of ferrofluids by the addition of biological nanotubes

ACS Nano
2010 | Journal article
EID:

2-s2.0-78650162162

Part of ISSN: 19360851 1936086X
Contributors: Wu, Z.; Mueller, A.; Degenhard, S.; Ruff, S.E.; Geiger, F.; Bittner, A.M.; Wege, C.; Krill, C.E.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier

Preparation and magnetoviscosity of nanotube ferrofluids by viral scaffolding and ALD on porous templates

Physica Status Solidi (B) Basic Research
2010 | Journal article
EID:

2-s2.0-78650465768

Part of ISSN: 03701972 15213951
Contributors: Wu, Z.; Zierold, R.; Mueller, A.; Ruff, S.E.; Ma, C.; Khan, A.A.; Geiger, F.; Sommer, B.A.; Knez, M.; Nielsch, K. et al.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier

FePt nanorods and nanowires for novel ferrofluids

Solid State Phenomena
2009 | Book
EID:

2-s2.0-75649106904

Part of ISSN: 10120394
Contributors: Wu, Z.; Dong, H.; Chuvilin, A.; Wiedwald, U.; Han, L.; Krill III, C.E.
Source: Self-asserted source
Zhenyu Wu via Scopus - Elsevier