Personal information

Other IDs

Scopus Author ID: 35430272500
Scopus Author ID: 58066315300

Keywords

semiconductors; laser processing; laser spike annealing

Activities

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Employment (1)

Cornell University: Ithaca, NY, US

1984-01-10 to present | Associate Professor (Materials Science and Engineering)
Employment
Source: Self-asserted source
Michael Thompson

Education and qualifications (2)

Cornell University: Ithaca, NY, US

1979-08-25 to 1984-01-10 | Ph.D (Applied and Engineering Physics)
Education
Source: Self-asserted source
Michael Thompson

California Institute of Technology: Pasadena, CA, US

1975-09-01 to 1979-05-30 | B.S. (Applied Physics)
Education
Source: Self-asserted source
Michael Thompson

Works (50 of 204)

Items per page:
Page 1 of 5

High throughput identification of complex rutile alloys for the acidic oxygen evolution reaction

Journal of Materials Chemistry A
2023 | Journal article
Contributors: Zhou, Lan; Shinde, Aniketa; Chang, Ming-Chiang; van Dover, R Bruce; Thompson, Michael O; Gregoire, John M
Source: Self-asserted source
Michael Thompson

Laser Annealing-Induced Phase Transformation Behaviors of High Entropy Metal Alloy, Oxide, and Nitride Nanoparticle Combinations

Advanced Functional Materials
2023 | Journal article
Contributors: Li, Yun; Tay, Yee Yan; Buenconsejo, Pio JS; Manalastas Jr, William; Tu, Wei Han; Lim, Hong Kit; Salim, Teddy; Thompson, Michael O; Madhavi, Srinivasan; Tay, Chor Yong et al.
Source: Self-asserted source
Michael Thompson

Laser Annealing-Induced Phase Transformation Behaviors of High Entropy Metal Alloy, Oxide, and Nitride Nanoparticle Combinations

Advanced Functional Materials
2023 | Journal article
DOI: 10.1002/adfm.202211279
EID:

2-s2.0-85146323867

Part of ISSN: 16163028 1616301X
Contributors: Li, Y.; Tay, Y.Y.; Buenconsejo, P.J.S.; Manalastas, W.; Tu, W.H.; Lim, H.K.; Salim, T.; Thompson, M.O.; Madhavi, S.; Tay, C.Y. et al.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Materials design for superconducting RF cavities: electroplating Sn, Zr and Au onto Nb and chemical vapor deposition

21st Int. Conf. on Radio-Frequency Superconductivity (SRF'23),(Grand Rapids, MI, USA)
2023 | Conference paper
Contributors: Sun, Z; Liepe, MU; Oseroff, T; Baraissov, Z; Muller, DA; Thompson, MO
Source: Self-asserted source
Michael Thompson

Probabilistic Phase Labeling and Lattice Refinement for Autonomous Material Research

arXiv preprint arXiv:2308.07897
2023 | Journal article
Contributors: Chang, Ming-Chiang; Ament, Sebastian; Amsler, Maximilian; Sutherland, Duncan R; Zhou, Lan; Gregoire, John M; Gomes, Carla P; van Dover, R Bruce; Thompson, Michael O
Source: Self-asserted source
Michael Thompson

Reaction-based mechanism for Nb3Sn nucleation: Role of oxygen

arXiv preprint arXiv:2305.05114
2023 | Journal article
Contributors: Sun, Zeming; Dare, Darrah K; Baraissov, Zhaslan; Muller, David A; Thompson, Michael O; Liepe, Matthias U
Source: Self-asserted source
Michael Thompson

Silicon Implantation and Annealing in $$\backslash$beta $-Ga $ _2 $ O $ _3 $: Role of Ambient, Temperature, and Time

arXiv preprint arXiv:2311.00821
2023 | Journal article
Contributors: Gann, Katie R; Pieczulewski, Naomi; Gorsak, Cameron A; Heinselman, Karen; Asel, Thaddeus J; Noesges, Brenton A; Smith, Kathleen T; Dryden, Daniel M; Xing, Huili Grace; Nair, Hari P et al.
Source: Self-asserted source
Michael Thompson

Smooth, homogeneous, high-purity Nb3Sn superconducting RF resonant cavity by seed-free electrochemical synthesis

Superconductor Science and Technology
2023 | Journal article
Contributors: Sun, Zeming; Baraissov, Zhaslan; Porter, Ryan D; Shpani, Liana; Shao, Yu-Tsun; Oseroff, Thomas; Thompson, Michael O; Muller, David A; Liepe, Matthias U
Source: Self-asserted source
Michael Thompson

Thermodynamic route of Nb3Sn nucleation: Role of oxygen

APL Materials
2023 | Journal article
Contributors: Sun, Zeming; Dare, Darrah K; Baraissov, Zhaslan; Muller, David A; Thompson, Michael O; Liepe, Matthias U
Source: Self-asserted source
Michael Thompson

500� C operation of $β$-Ga2O3 field-effect transistors

Applied Physics Letters
2022 | Journal article
Contributors: Islam, Ahmad E; Sepelak, Nicholas P; Liddy, Kyle J; Kahler, Rachel; Dryden, Daniel M; Williams, Jeremiah; Lee, Hanwool; Gann, Katie; Popp, Andreas; Leedy, Kevin D et al.
Source: Self-asserted source
Michael Thompson

Initial nucleation of metastable $γ$-Ga2O3 during sub-millisecond thermal anneals of amorphous Ga2O3

Applied Physics Letters
2022 | Journal article
Contributors: Gann, Katie R; Chang, Celesta S; Chang, Ming-Chiang; Sutherland, Duncan R; Connolly, Aine B; Muller, David A; van Dover, Robert B; Thompson, Michael O
Source: Self-asserted source
Michael Thompson

Laser annealing-induced phase transformation behaviors of multicomponent metal alloy, oxide and nitride nanoparticle combinations

2022 | Journal article
Contributors: Li, Yun; Tay, Yee Yan; Buenconsejo, Pio; Manalastas Jr, William; Tu, Wei Han; Lim, Hong Kit; Salim, Teddy; Thompson, Michael; Madhavi, Srinivasan; Tay, Chor Yong et al.
Source: Self-asserted source
Michael Thompson

Autonomous materials synthesis via hierarchical active learning of nonequilibrium phase diagrams

Science Advances
2021 | Journal article
Contributors: Ament, Sebastian; Amsler, Maximilian; Sutherland, Duncan R; Chang, Ming-Chiang; Guevarra, Dan; Connolly, Aine B; Gregoire, John M; Thompson, Michael O; Gomes, Carla P; van Dover, R Bruce
Source: Self-asserted source
Michael Thompson

Crystal orientation dictated epitaxy of ultrawide-bandgap 5.4-to 8.6-eV $α$-(AlGa) 2O3 on m-plane sapphire

Science Advances
2021 | Journal article
Contributors: Jinno, Riena; Chang, Celesta S; Onuma, Takeyoshi; Cho, Yongjin; Ho, Shao-Ting; Rowe, Derek; Cao, Michael C; Lee, Kevin; Protasenko, Vladimir; Schlom, Darrell G et al.
Source: Self-asserted source
Michael Thompson

Rapid identification of synthetic routes to functional metastable phases using X-ray Probed Laser Anneal Mapping (XPLAM) time--temperature quench Maps

Chemistry of Materials
2021 | Journal article
Contributors: Bell, Robert T; Beaucage, Peter A; Murphy, Marc J; Connolly, Aine B; Wiesner, Ulrich; Ginley, David; Van Dover, R Bruce; Thompson, Michael O
Source: Self-asserted source
Michael Thompson

Surface roughness reduction of Nb3Sn thin films via laser annealing for superconducting radio-frequency cavities

International Particle Accelerator Conference (SRF'21), virtual
2021 | Conference paper
Contributors: Sun, Z; Ge, M; Liepe, MU; Oseroff, T; Porter, RD; Connolly, A; Thompson, MO
Source: Self-asserted source
Michael Thompson

Thermal stability of epitaxial $α$-Ga2O3 and (Al, Ga) 2O3 layers on m-plane sapphire

Applied Physics Letters
2021 | Journal article
Contributors: McCandless, JP; Chang, CS; Nomoto, K; Casamento, J; Protasenko, V; Vogt, P; Rowe, D; Gann, K; Ho, ST; Li, W et al.
Source: Self-asserted source
Michael Thompson

Block copolymer self-assembly-directed and transient laser heating-enabled nanostructures toward phononic and photonic quantum materials

ACS nano
2020 | Journal article
Contributors: Yu, Fei; Zhang, Qi; Thedford, R Paxton; Singer, Andrej; Smilgies, Detlef-M; Thompson, Michael O; Wiesner, Ulrich B
Source: Self-asserted source
Michael Thompson

Optical identification of materials transformations in oxide thin films

ACS Combinatorial Science
2020 | Journal article
Contributors: Sutherland, Duncan R; Connolly, Aine Boyer; Amsler, Maximilian; Chang, Ming-Chiang; Gann, Katie Rose; Gupta, Vidit; Ament, Sebastian; Guevarra, Dan; Gregoire, John M; Gomes, Carla P et al.
Source: Self-asserted source
Michael Thompson

Electroplating of Sn film on Nb substrate for generating Nb3Sn thin films and post laser annealing

19th International Conference on RF Superconductivity (SRF'19), Dresden, Germany
2019 | Conference paper
Contributors: Sun, Z; Liepe, M; Oseroff, T; Porter, RD; Arias, T; Sitaraman, N; Connolly, A; Scholtz, J; Thompson, MO
Source: Self-asserted source
Michael Thompson

Activation of Si implants into InAs characterized by Raman scattering

Journal of Applied Physics
2016 | Journal article
DOI: 10.1063/1.4942880
EID:

2-s2.0-84960367026
Contributors: Lind, A.G.; Martin, T.P.; Sorg, V.C.; Kennon, E.L.; Truong, V.Q.; Aldridge, H.L.; Hatem, C.; Thompson, M.O.; Jones, K.S.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

μ-Rainbow: CdSe Nanocrystal Photoluminescence Gradients via Laser Spike Annealing for Kinetic Investigations and Tunable Device Design

Nano Letters
2016 | Journal article
DOI: 10.1021/acs.nanolett.5b03918
EID:

2-s2.0-84958214348
Contributors: Treml, B.E.; Jacobs, A.G.; Bell, R.T.; Thompson, M.O.; Hanrath, T.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Chemical etch rate and X-ray structure of reactive sputtered c-axis aligned crystalline In<inf>x</inf>Ga<inf>y</inf>Zn<inf>z</inf>O<inf>4</inf> films

ECS Journal of Solid State Science and Technology
2015 | Journal article
DOI: 10.1149/2.0261505jss
EID:

2-s2.0-84928349661
Contributors: Zhu, B.; Lynch, D.M.; Chung, C.-Y.; Ast, D.G.; Greene, R.G.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Control of polystyrene-block-poly(methyl methacrylate) directed self-Assembly by laser-induced millisecond thermal annealing

Journal of Micro/ Nanolithography, MEMS, and MOEMS
2015 | Journal article
DOI: 10.1117/1.JMM.14.3.031205
EID:

2-s2.0-84953897556
Contributors: Jacobs, A.G.; Jung, B.; Jiang, J.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Deposition conditions and HRTEM characterization of CAAC IGZO

Digest of Technical Papers - SID International Symposium
2015 | Conference paper
EID:

2-s2.0-84963636517
Contributors: Lynch, D.M.; Zhu, B.; Levin, B.D.A.; Muller, D.A.; Ast, D.G.; Greene, R.G.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Dopant activation and deactivation in InGaAs during sub-millisecond thermal annealing

ECS Transactions
2015 | Conference paper
DOI: 10.1149/06604.0117ecst
EID:

2-s2.0-84931470079
Contributors: Sorg, V.C.; Zhang, S.N.; Hill, M.; Clancy, P.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Effect of Laser Annealing on the Structure of Amorphous Porous SiCOH Materials

Journal of Physical Chemistry C
2015 | Journal article
DOI: 10.1021/jp5111967
EID:

2-s2.0-84931275558
Contributors: Raymunt, A.M.; Bell, R.T.; Thompson, M.O.; Clancy, P.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Energetics of neutral Si dopants in InGaAs: An ab initio and semiempirical Tersoff model study

Physical Review B - Condensed Matter and Materials Physics
2015 | Journal article
DOI: 10.1103/PhysRevB.91.094108
EID:

2-s2.0-84925854393
Contributors: Lee, C.-W.; Lukose, B.; Thompson, M.O.; Clancy, P.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

High mobility, dual layer, c-axis aligned crystalline/amorphous IGZO thin film transistor

Applied Physics Letters
2015 | Journal article
DOI: 10.1063/1.4935026
EID:

2-s2.0-84946204431
Contributors: Chung, C.-Y.; Zhu, B.; Greene, R.G.; Thompson, M.O.; Ast, D.G.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Laser spike annealing of DSA photoresists

Journal of Photopolymer Science and Technology
2015 | Journal article
DOI: 10.2494/photopolymer.28.631
EID:

2-s2.0-84944542235
Contributors: Jiang, J.; Jacobs, A.; Thompson, M.O.; Ober, C.K.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Processing-structure-property relationships in laser-annealed PbSe nanocrystal thin films

ACS Nano
2015 | Journal article
DOI: 10.1021/acsnano.5b00167
EID:

2-s2.0-84928958288
Contributors: Treml, B.E.; Robbins, A.B.; Whitham, K.; Smilgies, D.-M.; Thompson, M.O.; Hanrath, T.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Transient laser heating induced hierarchical porous structures from block copolymer-directed self-assembly

Science
2015 | Journal article
DOI: 10.1126/science.aab0492
EID:

2-s2.0-84935079245
Contributors: Tan, K.W.; Jung, B.; Werner, J.G.; Rhoades, E.R.; Thompson, M.O.; Wiesner, U.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Understanding of PS-b-PMMA phase segregation under laser-induced millisecond thermal annealing

Proceedings of SPIE - The International Society for Optical Engineering
2015 | Conference paper
DOI: 10.1117/12.2086057
EID:

2-s2.0-84931366575
Contributors: Jacobs, A.G.; Liedel, C.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Characterization of reactively sputtered c-axis aligned nanocrystalline InGaZnO<inf>4</inf>

Applied Physics Letters
2014 | Journal article
DOI: 10.1063/1.4905208
EID:

2-s2.0-84931328878
Contributors: Lynch, D.M.; Zhu, B.; Levin, B.D.A.; Muller, D.A.; Ast, D.G.; Greene, R.G.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Control of PS-b-PMMA directed self-assembly registration by laser induced millisecond thermal annealing

Proceedings of SPIE - The International Society for Optical Engineering
2014 | Conference paper
DOI: 10.1117/12.2046513
EID:

2-s2.0-84902089754
Contributors: Jacobs, A.G.; Jung, B.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Controlled roughness reduction of patterned resist polymers using laser-induced sub-millisecond heating

Journal of Materials Chemistry C
2014 | Journal article
DOI: 10.1039/c4tc01548g
EID:

2-s2.0-84908032164
Contributors: Jung, B.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Laser-induced sub-millisecond heating reveals distinct tertiary ester cleavage reaction pathways in a photolithographic resist polymer

ACS Nano
2014 | Journal article
DOI: 10.1021/nn500549w
EID:

2-s2.0-84903436670
Contributors: Jung, B.; Satish, P.; Bunck, D.N.; Dichtel, W.R.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Line width roughness reduction by rational design of photoacid generator for sub-millisecond laser post-exposure bake

Proceedings of SPIE - The International Society for Optical Engineering
2014 | Conference paper
DOI: 10.1117/12.2046277
EID:

2-s2.0-84902097246
Contributors: Jiang, J.; Thompson, M.O.; Ober, C.K.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Deposited low temperature silicon GHz modulator

CLEO: Science and Innovations, CLEO_SI 2013
2013 | Conference paper
EID:

2-s2.0-84887448661
Contributors: Lee, Y.H.D.; Thompson, M.O.; Lipson, M.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier
grade
Preferred source (of 4)‎

Line edge roughness of high deprotection activation energy photoresist by using sub-millisecond post exposure bake

Proceedings of SPIE - The International Society for Optical Engineering
2013 | Conference paper
DOI: 10.1117/12.2011667
EID:

2-s2.0-84878415062
Contributors: Jiang, J.; Jung, B.; Thompson, M.O.; Ober, C.K.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Deprotection reaction kinetics in chemically amplified photoresists determined by sub-millisecond post exposure bake

Proceedings of SPIE - The International Society for Optical Engineering
2012 | Conference paper
DOI: 10.1117/12.916605
EID:

2-s2.0-84861070416
Contributors: Jung, B.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Excimer-laser-induced melting and solidification of PECVD a-Si films under partial-melting conditions

Materials Research Society Symposium Proceedings
2012 | Conference paper
DOI: 10.1557/opl.2011.933
EID:

2-s2.0-84455190970
Contributors: Hu, Q.; Lee, C.S.; Li, T.; Deng, Y.; Chung, U.J.; Limanov, A.B.; Chitu, A.M.; Thompson, M.O.; Im, J.S.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations

Applied Physics Letters
2012 | Journal article
DOI: 10.1063/1.4717745
EID:

2-s2.0-84861796588
Contributors: Iyengar, K.; Jung, B.; Willemann, M.; Clancy, P.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Investigation of acid diffusion during laser spike annealing with systematically designed photoacid generators

Proceedings of SPIE - The International Society for Optical Engineering
2012 | Conference paper
DOI: 10.1117/12.916318
EID:

2-s2.0-84861043725
Contributors: Krysak, M.; Jung, B.; Thompson, M.O.; Ober, C.K.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Kinetic rates of thermal transformations and diffusion in polymer systems measured during sub-millisecond laser-induced heating

ACS Nano
2012 | Journal article
DOI: 10.1021/nn300008a
EID:

2-s2.0-84864226092
Contributors: Jung, B.; Sha, J.; Paredes, F.; Chandhok, M.; Younkin, T.R.; Wiesner, U.; Ober, C.K.; Thompson, M.O.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Addressing challenges in lithography using sub-millisecond post exposure bake of chemically amplified resists

Proceedings of SPIE - The International Society for Optical Engineering
2011 | Conference paper
DOI: 10.1117/12.879288
EID:

2-s2.0-79955928221
Contributors: Jung, B.; Ober, C.K.; Thompson, M.O.; Younkin, T.R.; Chandhok, M.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Characterization of dopant diffusion, mobility, activation and deactivation effects for n-type dopants with long-dwell laser spike annealing

Extended Abstracts of the 11th International Workshop on Junction Technology, IWJT 2011
2011 | Conference paper
DOI: 10.1109/IWJT.2011.5970016
EID:

2-s2.0-80052118575
Contributors: Chen, S.; Wang, Y.; Heidelberger, C.; Thompson, M.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Colloidal self-assembly-directed laser-induced non-close-packed crystalline silicon nanostructures

ACS Nano
2011 | Journal article
DOI: 10.1021/nn2023446
EID:

2-s2.0-80054972258
Contributors: Tan, K.W.; Saba, S.A.; Arora, H.; Thompson, M.O.; Wiesner, U.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

LWR reduction and flow of chemically amplified resist patterns during sub-millisecond heating

Proceedings of SPIE - The International Society for Optical Engineering
2011 | Conference paper
DOI: 10.1117/12.881675
EID:

2-s2.0-79955887366
Contributors: Jung, B.; Ober, C.K.; Thompson, M.O.; Chandhok, M.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier

Pulsed laser annealing of thin films of self-assembled nanocrystals

ACS Nano
2011 | Journal article
DOI: 10.1021/nn201588p
EID:

2-s2.0-80053339296
Contributors: Baumgardner, W.J.; Choi, J.J.; Bian, K.; Fitting Kourkoutis, L.; Smilgies, D.-M.; Thompson, M.O.; Hanrath, T.
Source: Self-asserted source
Michael Thompson via Scopus - Elsevier
Items per page:
Page 1 of 5

Peer review (10 reviews for 7 publications/grants)

Review activity for Acta materialia. (1)
Review activity for Advanced functional materials. (2)
Review activity for Advanced optical materials (1)
Review activity for Advanced photonics research. (2)
Review activity for Journal of applied physics. (1)
Review activity for Journal of electronic materials. (1)
Review activity for Small. (2)
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