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Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory

Sensors
2022-11 | Journal article | Author
Contributors: Nikolay Smagin; Meddy VANOTTI; Marc Duquennoy; Lionel Rousseau; Hassan Alhousseini; Virginie BLONDEAU-PATISSIER; MOHAMMADI OUAFTOUH; Laurie Valbin; Etienne Herth
Source: check_circle
Multidisciplinary Digital Publishing Institute

Synthesis of naked vanadium pentoxide nanoparticles

Nanoscale Advances
2021 | Journal article
EID:

2-s2.0-85103740800

Part of ISSN: 25160230
Contributors: Taylor, P.; Kusper, M.; Hesabizadeh, T.; Geoffrion, L.D.; Watanabe, F.; Herth, E.; Guisbiers, G.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Screening of spherical moulds manufactured isotropically in plasma etching conditions

Contributions to Plasma Physics
2021-04-27 | Journal article
Part of ISSN: 0863-1042
Part of ISSN: 1521-3986
Source: Self-asserted source
Etienne Herth

Defects management in the gain media of GeSn micro-disk lasers

2020 IEEE Photonics Conference, IPC 2020 - Proceedings
2020 | Conference paper
EID:

2-s2.0-85097878167

Contributors: Wang, B.; Elbaz, A.; Herth, E.; Sakat, E.; Durnez, A.; Villebasse, C.; Patriarche, G.; Checoury, X.; Pantzas, K.; Sagnes, I. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Designing Micro-Mechanical Cantilever Resonator Arrays for Wideband Detection of Ultrasonic Xylem Cavitation Emissions Related to Plant Water-Stress

2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020
2020 | Conference paper
EID:

2-s2.0-85092000264

Contributors: Oletic, D.; Herth, E.; Bouville, D.; Martincic, E.; Bilas, V.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

GaAs manufacturing processes conditions for micro- and nanoscale devices

Journal of Manufacturing Processes
2020 | Journal article
EID:

2-s2.0-85096118514

Part of ISSN: 15266125
Contributors: Joint, F.; Abadie, C.; Vigneron, P.B.; Boulley, L.; Bayle, F.; Isac, N.; Cavanna, A.; Cambril, E.; Herth, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Long-range Planar Conveyance Device Based on A Digital Electromagnetic Actuator Array

2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020
2020 | Conference paper
EID:

2-s2.0-85091977242

Contributors: Duque Tisnes, S.; Shi, Z.; Herth, E.; Edmond, S.; Petit, L.; Martincic, E.; Prelle, C.; Terrien, J.; Moulin, J.; Lefeuvre, E. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Reduced Lasing Thresholds in GeSn Microdisk Cavities with Defect Management of the Optically Active Region

ACS Photonics
2020 | Journal article
EID:

2-s2.0-85096110490

Part of ISSN: 23304022
Contributors: Elbaz, A.; Arefin, R.; Sakat, E.; Wang, B.; Herth, E.; Patriarche, G.; Foti, A.; Ossikovski, R.; Sauvage, S.; Checoury, X. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Tensile strain engineering and defects management in gesn laser cavities

ECS Transactions
2020 | Conference paper
EID:

2-s2.0-85092651430

Part of ISSN: 19385862 19386737
Contributors: El Kurdi, M.; Elbaz, A.; Wang, B.; Sakat, E.; Herth, E.; Patriarche, G.; Pantzas, K.; Sagnes, I.; Sauvage, S.; Checoury, X. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Thermal annealing of AlN films for piezoelectric applications

Journal of Materials Science: Materials in Electronics
2020 | Journal article
EID:

2-s2.0-85079715705

Part of ISSN: 1573482X 09574522
Contributors: Herth, E.; Fall, D.; Rauch, J.-Y.; Mourtalier, V.; Guisbiers, G.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Ultra-low-threshold continuous-wave and pulsed lasing in tensile-strained GeSn alloys

Nature Photonics
2020 | Journal article
EID:

2-s2.0-85081888196

Part of ISSN: 17494893 17494885
Contributors: Elbaz, A.; Buca, D.; von den Driesch, N.; Pantzas, K.; Patriarche, G.; Zerounian, N.; Herth, E.; Checoury, X.; Sauvage, S.; Sagnes, I. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

A 2 x 2 Beam Divider for an array local oscillator at 1.37 THz

International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
2019 | Conference paper
EID:

2-s2.0-85074694728

Part of ISSN: 21622035 21622027
Contributors: Zhu, H.; Valentin, J.; Vacelet, T.; Herth, E.; Delorme, Y.; Wiedner, M.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Electrical and optical properties of sputtered ultra-thin indium tin oxide films using xenon/argon gas

Journal of Materials Science: Materials in Electronics
2019 | Journal article
EID:

2-s2.0-85064174387

Part of ISSN: 1573482X 09574522
Contributors: Hamouda, F.; Herth, E.; David, C.; Bayle, F.; Plante, M.P.; Martin, A.; Aassime, A.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Electromagnetic analysis for optical coherence tomography based through silicon vias metrology

Applied Optics
2019 | Journal article
EID:

2-s2.0-85072382329

Part of ISSN: 21553165 1559128X
Contributors: Iff, W.A.; Hugonin, J.-P.; Sauvan, C.; Besbes, M.; Chavel, P.; Vienne, G.; Milord, L.; Alliata, D.; Herth, E.; Coste, P. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
2019 | Journal article
EID:

2-s2.0-85062057195

Part of ISSN: 21662754 21662746
Contributors: Herth, E.; Baranski, M.; Berlharet, D.; Edmond, S.; Bouville, D.; Calvet, L.E.; Gorecki, C.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Impact of tensile strain on low Sn content GeSn lasing

Scientific Reports
2019 | Journal article
EID:

2-s2.0-85060395065

Part of ISSN: 20452322
Contributors: Rainko, D.; Ikonic, Z.; Elbaz, A.; von den Driesch, N.; Stange, D.; Herth, E.; Boucaud, P.; El Kurdi, M.; Grützmacher, D.; Buca, D.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Micro-/Nanopillars for Micro- and Nanotechnologies Using Inductively Coupled Plasmas

Physica Status Solidi (A) Applications and Materials Science
2019 | Journal article
EID:

2-s2.0-85074111127

Part of ISSN: 18626319 18626300
Contributors: Herth, E.; Edmond, S.; Bouville, D.; Cercus, J.L.; Bayle, F.; Cambril, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Multilayer dielectric diagonal horn for reshaping THz QCL beam pattern

ISSTT 2019 - 30th International Symposium on Space Terahertz Technology, Proceedings Book
2019 | Conference paper
EID:

2-s2.0-85088352409

Contributors: Zhu, H.; Joint, F.; Herth, E.; Decanini, D.; Delorme, Y.; Colombelli, R.; Xue, Q.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Progress in OCT-based through Silicon Via (TSV) metrology

Optics InfoBase Conference Papers
2019 | Conference paper
EID:

2-s2.0-85084421942

Contributors: Iff, W.A.; Hugonin, J.-P.; Sauvan, C.; Besbes, M.; Chavel, P.; Vienne, G.; Milord, L.; Alliata, D.; Herth, E.; Coste, P. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Ultra-Low Threshold CW Lasing in Tensile Strained GeSn Microdisk Cavities

IEEE International Conference on Group IV Photonics GFP
2019 | Conference paper
EID:

2-s2.0-85073476932

Part of ISSN: 19492081
Contributors: Boeuf, F.; Boucaud, P.; Buca, D.; Checoury, X.; El Kurdi, M.; Elbaz, A.; Grützmacher, D.; Hartmann, J.M.; Herth, E.; Ikonic, Z. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Advanced and reliable GaAs/AlGaAs ICP-DRIE etching for optoelectronic, microelectronic and microsystem applications

Microelectronic Engineering
2018 | Journal article
EID:

2-s2.0-85055753113

Part of ISSN: 01679317
Contributors: Vigneron, P.B.; Joint, F.; Isac, N.; Colombelli, R.; Herth, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

A biocompatible and flexible polyimide for wireless sensors

Microsystem Technologies
2017 | Journal article
EID:

2-s2.0-85015838945

Part of ISSN: 09467076
Contributors: Herth, E.; Guerchouche, K.; Rousseau, L.; Calvet, L.E.; Loyez, C.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Conductive polymer based antenna for wireless green sensors applications

Microelectronic Engineering
2017 | Journal article
EID:

2-s2.0-85028838276

Part of ISSN: 01679317
Contributors: Guerchouche, K.; Herth, E.; Calvet, L.E.; Roland, N.; Loyez, C.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Dielectric characterization based on a printable resonant stub in air and a liquid environment

Physica Status Solidi (A) Applications and Materials Science
2017 | Journal article
EID:

2-s2.0-85019216929

Part of ISSN: 18626319 18626300
Contributors: Guerchouche, K.; Herth, E.; Calvet, L.E.; Roland, N.; Loyez, C.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Fast time-domain laser Doppler vibrometry characterization of surface acoustic waves devices

Sensors and Actuators, A: Physical
2017 | Journal article
EID:

2-s2.0-85026852258

Part of ISSN: 09244247
Contributors: Smagin, N.; Djoumi, L.; Herth, E.; Vanotti, M.; Fall, D.; Blondeau-Patissier, V.; Duquennoy, M.; Ouaftouh, M.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Microsystem Technologies
2017 | Journal article
EID:

2-s2.0-84949528198

Part of ISSN: 09467076
Contributors: Herth, E.; Valbin, L.; Lardet-Vieudrin, F.; Algré, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Biodevice optimization based on piezoresistive sensor dedicated to monitoring the culture of fibroblast collagen lattices

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
2016 | Conference paper
EID:

2-s2.0-84979995371

Contributors: Yusifli, E.; Gharbi, T.; Yahiaom, R.; Herth, E.; Belharet, D.; Addouche, M.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Detection of out-of-plane and in-plane (XYZ) motions of piezoelectric microcantilever by 3D-Laser Doppler Vibrometry

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
2016 | Conference paper
EID:

2-s2.0-84979987558

Contributors: Herth, E.; Lardet-Vieudrin, F.; Deux, F.; Valbin, L.; Algre, E.; Schell, J.; Steger, H.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Electrogeneration of diiodoaurate in dimethylsulfoxide on gold substrate and localized patterning

International Journal of Electrochemical Science
2016 | Journal article
EID:

2-s2.0-84987897327

Part of ISSN: 14523981
Contributors: Kandory, A.; Yahiaoui, R.; Herth, E.; Cattey, H.; Gharbi, T.; Herlem, G.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Geological conditions and influences on ground control at San Juan Mine

2016 SME Annual Conference and Expo: The Future for Mining in a Data-Driven World
2016 | Conference paper
EID:

2-s2.0-84988353935

Contributors: Burkhard, D.; Herth, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Investigation of amorphous SiOx layer on gold surface for Surface Plasmon Resonance measurements

Microelectronic Engineering
2016 | Journal article
EID:

2-s2.0-84973890984

Part of ISSN: 01679317
Contributors: Herth, E.; Zeggari, R.; Rauch, J.-Y.; Remy-Martin, F.; Boireau, W.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Mechanical behavior of T-shaped A1N membrane based on thin film elongation acoustic resonator

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
2016 | Conference paper
EID:

2-s2.0-84980044697

Contributors: Herth, E.; Lardet-Vieudrin, F.; Valbin, L.; Lissorgues, G.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

Physica Status Solidi (A) Applications and Materials Science
2016 | Journal article
EID:

2-s2.0-84954397943

Part of ISSN: 18626319 18626300
Contributors: Herth, E.; Algré, E.; Rauch, J.-Y.; Gerbedoen, J.-C.; Defrance, N.; Delobelle, P.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

New Optical Approach of SAW Delay Line Characterization

Procedia Engineering
2016 | Conference paper
EID:

2-s2.0-85010014504

Part of ISSN: 18777058
Contributors: Djoumi, L.; Smagin, N.; Vanotti, M.; Fall, D.; Herth, E.; Duquennoy, M.; Ouaftouh, M.; Blondeau-Patissier, V.; Jenot, F.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
2015 | Conference paper
EID:

2-s2.0-84945973031

Contributors: Herth, E.; Lardet-Vieudrin, F.; Valbin, L.; Algre, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Estimation of temperature dependence of C<inf>44</inf> elastic constant in LiTaO<inf>3</inf> single crystals

2015 IEEE International Ultrasonics Symposium, IUS 2015
2015 | Conference paper
EID:

2-s2.0-84962019351

Contributors: Gonzalez, M.; Bartasyte, A.; Dulmet, B.; Guichardaz, B.; Henrot, F.; Bassignot, F.; Herth, E.; Margueron, S.; Ballandras, S.; Kajiyama, C. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

GaAs based on bulk acoustic wave sensor for biological molecules detection

Procedia Engineering
2015 | Conference paper
EID:

2-s2.0-84985020801

Part of ISSN: 18777058
Contributors: Lacour, V.; Herth, E.; Lardet-Vieudrin, F.; Dubowski, J.J.; Leblois, T.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

New capacitive micro-acoustic resonators machined in single-crystal silicon stacked structures

2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
2015 | Conference paper
EID:

2-s2.0-84943302733

Contributors: Belkadi, N.; Baron, T.; Dulmet, B.; Robert, L.; Herth, E.; Bernard, F.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015
2015 | Conference paper
EID:

2-s2.0-84961904815

Contributors: Herth, E.; Zeggari, R.; Rauch, J.-Y.; Remy-Martin, F.; Boireau, W.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Towards a miniature atomic scalar magnetometer using a liquid crystal polarization rotator

Sensors and Actuators, A: Physical
2014 | Journal article
EID:

2-s2.0-84904679385

Part of ISSN: 09244247
Contributors: Rutkowski, J.; Fourcault, W.; Bertrand, F.; Rossini, U.; Gétin, S.; Le Calvez, S.; Jager, T.; Herth, E.; Gorecki, C.; Le Prado, M. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate

IEEE Photonics Technology Letters
2014 | Journal article
EID:

2-s2.0-84891620481

Part of ISSN: 10411135
Contributors: Baranski, M.; Bargiel, S.; Passilly, N.; Guichardaz, B.; Herth, E.; Gorecki, C.; Jia, C.; Frömel, J.; Wiemer, M.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Experimental evidence of ultrasonic opacity using the coupling of resonant cavities in a phononic membrane

Applied Physics Letters
2013 | Journal article
EID:

2-s2.0-84883440641

Part of ISSN: 00036951
Contributors: Elayouch, A.; Addouche, M.; Herth, E.; Khelif, A.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Towards a miniature atomic scalar magnetometer using liquid crystal polarization rotator

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | Conference paper
EID:

2-s2.0-84891668939

Contributors: Rutkowski, J.; Fourcault, W.; Bertrand, F.; Rossini, U.; Getin, S.; Lartigue, O.; Le Calvez, S.; Jager, T.; Herth, E.; Le Prado, M. et al.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Wafer-level fabricated micro beam splitter based on 45-degree saw dicing of glass substrate

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | Conference paper
EID:

2-s2.0-84891705655

Contributors: Bargiel, S.; Baranski, M.; Passilly, N.; Guichardaz, B.; Herth, E.; Gorecki, C.; Jia, C.; Fromel, J.; Wiemer, M.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications

Microelectronics Reliability
2012 | Journal article
EID:

2-s2.0-84155171248

Part of ISSN: 00262714
Contributors: Herth, E.; Desré, H.; Algré, E.; Legrand, C.; Lasri, T.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Low power sessile droplets actuation via modulated surface acoustic waves

Applied Physics Letters
2012 | Journal article
EID:

2-s2.0-84859787146

Part of ISSN: 00036951
Contributors: Baudoin, M.; Brunet, P.; Matar, O.B.; Herth, E.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

IEEE Transactions on Nanotechnology
2012 | Journal article
EID:

2-s2.0-84863756804

Part of ISSN: 1536125X
Contributors: Herth, E.; Algré, E.; Tilmant, P.; François, M.; Boyaval, C.; Legrand, B.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Wafer level packaging compatible with millimeter-wave antenna

Sensors and Actuators, A: Physical
2012 | Journal article
EID:

2-s2.0-84655167943

Part of ISSN: 09244247
Contributors: Herth, E.; Seok, S.; Rolland, N.; Lasri, T.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Mechanical characterization of aluminium nanofilms

Microelectronic Engineering
2011 | Journal article
EID:

2-s2.0-79952489721

Part of ISSN: 01679317
Contributors: Guisbiers, G.; Herth, E.; Buchaillot, L.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier

Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process

Microelectronic Engineering
2011 | Journal article
EID:

2-s2.0-79952488326

Part of ISSN: 01679317
Contributors: Herth, E.; Algré, E.; Legrand, B.; Buchaillot, L.
Source: Self-asserted source
Etienne Herth via Scopus - Elsevier
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Peer review (3 reviews for 3 publications/grants)

Review activity for ChemPlusChem. (1)
Review activity for Micromachines. (1)
Review activity for Physica status solidi. (1)