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An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules

IEEE Transactions on Systems, Man, and Cybernetics: Systems
2023-06 | Journal article
DOI: 10.1109/TSMC.2022.3222915
Contributors: WenQing Xiong; Jie Li; Yan Qiao; LiPing Bai; BaoYing Huang; NaiQi Wu
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Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools

IEEE Transactions on Automation Science and Engineering
2021-10 | Journal article
DOI: 10.1109/tase.2020.3014078
Part of ISSN: 1545-5955
Part of ISSN: 1558-3783
Source: Self-asserted source
WenQing Xiong

Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network

IEEE Transactions on Semiconductor Manufacturing
2021-05 | Journal article
DOI: 10.1109/tsm.2021.3068974
Part of ISSN: 0894-6507
Part of ISSN: 1558-2345
Source: Self-asserted source
WenQing Xiong
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