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Effect of Potassium Ferrocyanide on CMP Performance of Ruthenium in H2O2-based Slurries

ECS Journal of Solid State Science and Technology
2024-06-03 | Journal article
DOI: 10.1149/2162-8777/ad4fbe
Contributors: Renhao Liu; Yi Xu; Yuling Liu; Baimei Tan; Jinbo Ji; Shihao Zhang; Jiadong Zhao
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Synergetic Effect of 5-Methyl-1H-Benzotriazole and Sodium Dodecyl Benzene Sulfonate on CMP Performance of Ruthenium Barrier Layer in KIO4-Based Slurry

ECS Journal of Solid State Science and Technology
2020-11-01 | Journal article
DOI: 10.1149/2162-8777/abbea0
Contributors: Yi Xu; Baimei Tan; Lianjun Hu; Yuling Liu
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