Personal information

Activities

Works (8)

A Comprehensive Study of NF3-Based Selective Etching Processes: Application to the Fabrication of Vertically Stacked Horizontal Gate-All-around Si Nanosheet Transistors

Nanomaterials
2024-05-24 | Journal article
Contributors: Xin Sun; Jiayang Li; Lewen Qian; Dawei Wang; Ziqiang Huang; Xinlong Guo; Tao Liu; Saisheng Xu; Liming Wang; Min Xu et al.
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

Fabrication of the low-k films with tunable k value as spacers in advanced CMOS technology

Journal of Vacuum Science & Technology A
2024-03-01 | Journal article
Contributors: Lewen Qian; Xin Sun; Tao Liu; Ziqiang Huang; Xinlong Guo; Maolin Pan; Dawei Wang; Saisheng Xu; Min Xu; Chen Wang et al.
Source: check_circle
Crossref

A Novel Atomic-Level Post-Etch-Surface-Reinforcement Process for High-Performance p-GaN Gate HEMTs Fabrication

Nanomaterials
2023-08-08 | Journal article
Contributors: Luyu Wang; Penghao Zhang; Kaiyue Zhu; Qiang Wang; Maolin Pan; Xin Sun; Ziqiang Huang; Kun Chen; Yannan Yang; Xinling Xie et al.
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

A Novel Scheme for Full Bottom Dielectric Isolation in Stacked Si Nanosheet Gate-All-Around Transistors

Micromachines
2023-05-24 | Journal article
Contributors: Jingwen Yang; Ziqiang Huang; Dawei Wang; Tao Liu; Xin Sun; Lewen Qian; Zhecheng Pan; Saisheng Xu; Chen Wang; Chunlei Wu et al.
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

Impact of Stress and Dimension on Nanosheet Deformation during Channel Release of Gate-All-Around Device

Micromachines
2023-03-07 | Journal article
Contributors: Jingwen Yang; Kun Chen; Dawei Wang; Tao Liu; Xin Sun; Qiang Wang; Ziqiang Huang; Zhecheng Pan; Saisheng Xu; Chen Wang et al.
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

Investigation of Source/Drain Recess Engineering and Its Impacts on FinFET and GAA Nanosheet FET at 5 nm Node

Electronics
2023-02-03 | Journal article
Contributors: Dawei Wang; Xin Sun; Tao Liu; Kun Chen; Jingwen Yang; Chunlei Wu; Min Xu; Wei (David) Zhang
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

A Novel Si Nanosheet Channel Release Process for the Fabrication of Gate-All-Around Transistors and Its Mechanism Investigation

Nanomaterials
2023-01-27 | Journal article
Contributors: Xin Sun; Dawei Wang; Lewen Qian; Tao Liu; Jingwen Yang; Kun Chen; Luyu Wang; Ziqiang Huang; Min Xu; Chen Wang et al.
Source: check_circle
Crossref
grade
Preferred source (of 2)‎

Flexible lamb wave resonators with high figure of merit

Applied Physics Letters
2019-08-26 | Journal article
Contributors: Xin Sun; Menglun Zhang; Chuanhai Gao; Yuan Ning; Yi Yuan; Wei Pang
Source: check_circle
Crossref