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Works (5)

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

International Journal of Precision Engineering and Manufacturing-Green Technology
2022-01 | Journal article
DOI: 10.1007/s40684-021-00367-y
Contributors: Michael M. Roos; Andreas Winkler; Madeleine Nilsen; Siegfried B. Menzel; Steffen Strehle
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Crossref

Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes

Journal of Micromechanics and Microengineering
2021-05-01 | Journal article
DOI: 10.1088/1361-6439/abf332
Contributors: A Behroudj; P Salimitari; M Nilsen; S Strehle
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Direct polymer microcantilever fabrication from free-standing dry film photoresists

Journal of Micromechanics and Microengineering
2020-09-01 | Journal article
DOI: 10.1088/1361-6439/ab9e4c
Contributors: Madeleine Nilsen; Oliver Dannberg; Thomas Fröhlich; Steffen Strehle
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The Electronic Properties of Silicon Nanowires during Their Dissolution under Simulated Physiological Conditions

Applied Sciences
2019-02 | Journal article | Author
DOI: 10.3390/app9040804
Contributors: Annina M. Steinbach; Tanja Sandner; Madeleine Nilsen; Ximeng Hua; Ragul Sivakumar; Dorin Geiger; Ardeshir Moeinian; Steffen Strehle
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Multidisciplinary Digital Publishing Institute
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Facile modification of freestanding silicon nitride microcantilever beams by dry film photoresist lithography

Journal of Micromechanics and Microengineering
2019-02-01 | Journal article
DOI: 10.1088/1361-6439/aaf7e3
Contributors: Madeleine Nilsen; Fabian Port; Michael Roos; Kay-Eberhard Gottschalk; Steffen Strehle
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Crossref
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