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Vacuum levitation and motion control on chip

2023 | Journal article
Contributors: Bruno Melo; Marc T. Cuairan; Gregoire F. M. Tomassi; Nadine Meyer; Romain Quidant
Source: Self-asserted source
Grégoire Franck Mario Tomassi

The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

Scientific Reports
2021-02-17 | Journal article
Part of ISSN: 2045-2322
Contributors: Simone Frasca; Rebecca C. Leghziel; Ivo N. Arabadzhiev; Benoît Pasquier; Grégoire F. M. Tomassi; Sandro Carrara; Edoardo Charbon
Source: Self-asserted source
Grégoire Franck Mario Tomassi