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Employment (1)

Fraunhofer-Gesellschaft: Chemnitz, Deutschland, DE

2015-12-01 to present
Employment
Source: Self-asserted source
Alexey Shaporin

Education and qualifications (1)

Technische Universität Chemnitz: Chemnitz, Deutschland, DE

2002-11-17 to 2015-12-01 | Dr.-Ing. (ET/IT)
Education
Source: Self-asserted source
Alexey Shaporin

Works (50 of 53)

Items per page:
Page 1 of 2

Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications

Micro
2024-02 | Journal article | Author
Contributors: Christian Behl; Regine Behlert; Jan Seiler; Christian Helke; Alexey Shaporin; Karla Hiller
Source: check_circle
Multidisciplinary Digital Publishing Institute
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Preferred source (of 2)‎

Design and characterization of a pyroelectric detector based on three-dimensional structured hafnium oxide thin films

Optical Engineering
2022 | Journal article
EID:

2-s2.0-85147546630

Part of ISSN: 15602303 00913286
Contributors: Lehmkau, R.; Mutschall, D.; Kaiser, A.; Ebermann, M.; Neumann, N.; Czernohorsky, M.; Neuber, M.; Hiller, K.; Seiler, J.; Großmann, T.D. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization

2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022
2022 | Conference paper
EID:

2-s2.0-85129561212

Contributors: Shaporin, A.; Weidlich, S.; Wunsch, D.; Hahn, S.; Forke, R.; Hiller, K.; Kuhn, H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

HIGH-G ACCELERATION SENSORS FOR THE AUTOMOTIVE INDUSTRY

2022 Smart Systems Integration, SSI 2022
2022 | Conference paper
EID:

2-s2.0-85129548680

Contributors: Pregl, S.; Landgraf, E.; Koehler, D.; Bieselt, S.; Hengst, C.; Meinhold, D.; Dahl, C.; Shaporin, A.; Weidlich, S.; Wünsch, D. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes

INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2022 | Conference paper
EID:

2-s2.0-85133225776

Contributors: Weidlich, S.; Forke, R.; Hiller, K.; Bulz, D.; Shaporin, A.; Kuhn, H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance

INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2022 | Conference paper
EID:

2-s2.0-85133240813

Contributors: Forke, R.; Hiller, K.; Hahn, S.; Shaporin, A.; Weidlich, S.; Bulz, D.; Kuchler, M.; Reuter, D.; Helke, C.; Wunsch, D. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging

2021 Smart Systems Integration, SSI 2021
2021 | Conference paper
EID:

2-s2.0-85114204720

Contributors: Bulz, D.; Weidlich, S.; Konietzka, S.; Motl, T.; Shaporin, A.; Forke, R.; Hiller, K.; Kuhn, H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Micromechanically structured, CMOS-compatible pyroelectric detector based on doped HfO2 in trench cells,Mikromechanisch strukturierter, CMOS-kompatibler pyroelektrischer Detektor auf der Basis von dotiertem HfO2 in Trenchzellen

MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings
2021 | Conference paper
EID:

2-s2.0-85125180678

Contributors: Mutschall, D.; Kaiser, A.; Lehmkau, R.; Ebermann, M.; Neumann, N.; Mart, C.; Eßlinger, S.; Neuber, M.; Weinreich, W.; Hiller, K. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

North finding with a single double mass MEMS gyroscope- A performance demonstrator

2021 DGON Inertial Sensors and Systems, ISS 2021 - Proceedings
2021 | Conference paper
EID:

2-s2.0-85123711121

Contributors: Bulz, D.; Forke, R.; Hiller, K.; Weidlich, S.; Hahn, S.; Shaporin, A.; Wunsch, D.; Konietzka, S.; Motl, T.; Billep, D. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

2d scanning micromirror with large scan angle and monolithically integrated angle sensors based on piezoelectric thin film aluminum nitride

Sensors (Switzerland)
2020 | Journal article
EID:

2-s2.0-85096185922

Part of ISSN: 14248220
Contributors: Meinel, K.; Melzer, M.; Stoeckel, C.; Shaporin, A.; Forke, R.; Zimmermann, S.; Hiller, K.; Otto, T.; Kuhn, H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design methodology and results evaluation of a heating functionality in modular lab-on-chip systems

Journal of Micromechanics and Microengineering
2018 | Journal article
EID:

2-s2.0-85045953596

Part of ISSN: 13616439 09601317
Contributors: Streit, P.; Nestler, J.; Shaporin, A.; Graunitz, J.; Otto, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Investigation on the temperature distribution of integrated heater configurations in a Lab-on-a-Chip system

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2017
2017 | Conference paper
EID:

2-s2.0-85020186920

Contributors: Streit, P.; Nestler, J.; Schulze, R.; Shaporin, A.; Otto, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

MEMS-based acoustic emission sensor system for condition monitoring,MEMS-basiertes Schallemissionssensorsystem für die Zustandsüberwachung

MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings
2017 | Conference paper
EID:

2-s2.0-85096810895

Contributors: Berner, T.; Schulze, R.; Shaporin, A.; Forke, R.; Otto, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Results of multi-mass high precision vibratory MEMS gyroscopes for two types of system approaches

International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
2017 | Conference paper
EID:

2-s2.0-85032286590

Contributors: Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Forke, R.; Shaporin, A.; Hiller, K.; Koehler, D. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Thermal design of integrated heating for lab-on-a-chip systems

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016
2016 | Conference paper
EID:

2-s2.0-84974533887

Contributors: Streit, P.; Nestler, J.; Shaporin, A.; Schulze, R.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals: molecular dynamics simulations and in situ experiments using electron microscopy

Mechatronics
2016 | Journal article
EID:

2-s2.0-85002979038

Part of ISSN: 09574158
Contributors: Hartmann, S.; Hermann, S.; Bonitz, J.; Heggen, M.; Hölck, O.; Shaporin, A.; Mehner, J.; Schulz, S.E.; Gessner, T.; Wunderle, B.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design and test of acoustic emission sensors based on the MEMS-bandpass principle,Entwurf und Test von Acoustic Emission Sensoren basierend auf dem MEMS-Bandpass-Prinzip

MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
2015 | Conference paper
EID:

2-s2.0-85096945699

Contributors: Freitag, M.; Auerswald, C.; Wolf, P.; Sorger, A.; Dienel, M.; Shaporin, A.; Mehner, J.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Towards nanoreliability of CNT-based sensor applications: Investigations of CNT-metal interfaces combining molecular dynamics simulations, advanced in situ experiments and analytics

2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
2015 | Conference paper
EID:

2-s2.0-84944811094

Contributors: Hartmann, S.; Shaporin, A.; Hermann, S.; Bonitz, J.; Heggen, M.; Meszmer, P.; Sturm, H.; Holck, O.; Blaudeck, T.; Schulz, S.E. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor

2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014
2014 | Conference paper
EID:

2-s2.0-84901463406

Contributors: Meszmer, P.; Hiller, K.; May, D.; Hartmann, S.; Shaporin, A.; Mehner, J.; Wunderle, B.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Microsystem Technologies
2014 | Journal article
EID:

2-s2.0-84901440630

Part of ISSN: 09467076
Contributors: Meszmer, P.; Hiller, K.; Hartmann, S.; Shaporin, A.; May, D.; Rodriguez, R.D.; Arnold, J.; Schondelmaier, G.; Mehner, J.; Zahn, D.R.T. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design, modeling, fabrication and characterization of a MEMS acceleration sensor for acoustic emission testing

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | Conference paper
EID:

2-s2.0-84891711841

Contributors: Sorger, A.; Auerswald, C.; Shaporin, A.; Freitag, M.; Dienel, M.; Mehner, J.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Determination of parameters with uncertainties for quality control in MEMS fabrication

Journal of Microelectromechanical Systems
2013 | Journal article
EID:

2-s2.0-84878554660

Part of ISSN: 10577157
Contributors: Gennat, M.; Meinig, M.; Shaporin, A.; Kurth, S.; Rembe, C.; Tibken, B.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
2013 | Conference paper
EID:

2-s2.0-84880972241

Contributors: Schondelmaier, G.; Hartmann, S.; May, D.; Shaporin, A.; Voigt, S.; Rodriguez, R.D.; Gordan, O.D.; Zahn, D.R.T.; Mehner, J.; Hiller, K. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Wafer-level technology for piezoresistive electro-mechanical transducer based on carbon nanotubes

Smart Systems Integration 2013, SSI 2013
2013 | Conference paper
EID:

2-s2.0-85064567253

Contributors: Hermann, S.; Bonitz, J.; Kaufmann, C.; Schulz, S.E.; Gessner, T.; Shaporin, A.; Voigt, S.; Mehner, J.; Hartmann, S.; Wunderle, B.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

CFD analysis of viscous losses in complex microsystems

International Multi-Conference on Systems, Signals and Devices, SSD 2012 - Summary Proceedings
2012 | Conference paper
EID:

2-s2.0-84861612455

Contributors: Sorger, A.; Freitag, M.; Shaporin, A.; Mehner, J.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

MEMS acoustic emission sensor with mechanical noise rejection

International Multi-Conference on Systems, Signals and Devices, SSD 2012 - Summary Proceedings
2012 | Conference paper
EID:

2-s2.0-84861637790

Contributors: Auerswald, C.; Sorger, A.; Dienel, M.; Shaporin, A.; Mehner, J.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Out of plane capacitive transducer in air gap insulation microstructures technology for high precision monolithic 3-axis sensors

SSI 2012 - Smart Systems Integration Conference 2012
2012 | Conference paper
EID:

2-s2.0-85032282386

Contributors: Reuter, D.; Nowack, M.; Shaporin, A.; Rockstroh, J.; Haas, S.; Bertz, A.; Mehner, J.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Crack propagation in micro-chevron-test samples of direct bonded wafers

9th Youth Symposium on Experimental Solid Mechanics, YSESM 2010
2010 | Conference paper
EID:

2-s2.0-85072888917

Contributors: Vogel, K.; Shaporin, A.; Wuensch, D.; Billep, D.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Novel method for parameter identification and characterization of mechanical stress for microsystems

Smart Systems Integration 2009, SSI 2009
2009 | Conference paper
EID:

2-s2.0-85064704455

Contributors: Shaporin, A.; Schmiedel, R.; Mehner, J.; Billep, D.; Sommer, J.-P.; Bauer, W.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Novel test structures for characterization of microsystems parameters at wafer level

Proceedings of SPIE - The International Society for Optical Engineering
2009 | Conference paper
EID:

2-s2.0-71449116710

Part of ISSN: 0277786X
Contributors: Shaporin, A.; Streit, P.; Specht, H.; Mehner, J.; Dötzel, W.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Time efficient test method for dimensional parameter determination based on resonant mode detection

Smart Systems Integration 2009, SSI 2009
2009 | Conference paper
EID:

2-s2.0-85064677348

Contributors: Meinig, M.; Kurth, S.; Shaporin, A.; Giessmann, S.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Characterization of standard-geometry micro structures: Chances and challenges,Erfassung von standardgeometrieelementen im mikrometerbereich: Herausforderungen und lösungsansätze

Technisches Messen
2008 | Journal article
EID:

2-s2.0-67651100791

Part of ISSN: 01718096
Contributors: Fleischer, J.; Buchholz, I.; Peters, J.; Viering, B.; Goch, G.; Patzelt, S.; Tausendfreund, A.; Mehner, J.; Dötzel, W.; Shaporin, A. et al.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Reliability of MEMS devices in shock and vibration overload situations

Proceedings of SPIE - The International Society for Optical Engineering
2008 | Conference paper
EID:

2-s2.0-41149141322

Part of ISSN: 0277786X
Contributors: Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Test-structures for wafer level microsystems characterization

Smart Systems Integration 2008 - 2nd European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2008
2008 | Conference paper
EID:

2-s2.0-85064660296

Contributors: Shaporin, A.; Forke, R.; Schmiedel, R.; Dötzel, W.; Mehner, J.; Billep, D.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Arrays of sensors with variable stiffness

Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
2007 | Conference paper
EID:

2-s2.0-85064626123

Contributors: Shaporin, A.; Seifert, М.; Hanf, M.; Hiller, K.; Frühauf, J.; Gessner, T.; Dötzel, W.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Determination of dimensional parameters in MEMS components by vibration analyses

Conference Proceedings of the Society for Experimental Mechanics Series
2007 | Conference paper
EID:

2-s2.0-84861535945

Part of ISSN: 21915644 21915652
Contributors: Kurth, S.; Mehner, J.; Shaporin, A.; Michael, S.; Ebert, M.; Dötzel, W.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Development and characterization of Cu to Cu bonding technology

Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
2007 | Conference paper
EID:

2-s2.0-85064681836

Contributors: Baum, M.; Letsch, H.; Shaporin, A.; Otto, T.; Gessner, T.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Test-Structure based MEMS characterization technique

Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
2007 | Conference paper
EID:

2-s2.0-85064630023

Contributors: Shaporin, A.; Hanf, M.; Forke, R.; Mehner, J.; Gessner, T.; Dötzel, W.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Field enhancement factor for an array of MWNTs in CNT paste

Applied Physics A: Materials Science and Processing
2006 | Journal article
EID:

2-s2.0-33645304836

Part of ISSN: 09478396 14320630
Contributors: Berdinsky, A.S.; Shaporin, A.V.; Yoo, J.-B.; Park, J.-H.; Alegaonkar, P.S.; Han, J.-H.; Son, G.-H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Efficient characterization method for MEMS devices

6th Annual International Siberian Workshop and Tutorials on Electron Devices and Materials, EDM 2005
2005 | Conference paper
EID:

2-s2.0-33749069333

Contributors: Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Novel characterization method for MEMS devices

Progress in Biomedical Optics and Imaging - Proceedings of SPIE
2005 | Conference paper
EID:

2-s2.0-21844439225

Part of ISSN: 16057422
Contributors: Shaporin, A.V.; Hanf, M.; Doetzel, W.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Stresses near the edges of a square silicon membrane

Russian Microelectronics
2005 | Journal article
EID:

2-s2.0-23744484636

Part of ISSN: 10637397
Contributors: Gridchin, V.A.; Grichenko, V.V.; Lubimsky, V.M.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Nonlinear response of a rectangular membrane sensing element

Russian Microelectronics
2003 | Journal article
EID:

2-s2.0-3543061245

Part of ISSN: 10637397
Contributors: Gridchin, V.A.; Lubimsky, V.M.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Nonlinear response of a rectangular membrane sensing element

Mikroelektronika
2003 | Journal article
EID:

2-s2.0-0043065481

Part of ISSN: 05441269
Contributors: Gridchin, V.A.; Lubimskij, V.M.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Experimental research of silicon flowmeters based on piezoresistance effect

International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings
2002 | Conference paper
EID:

2-s2.0-84948761030

Part of ISSN: 18153712
Contributors: Kolchuzhin, V.A.; Nazin, A.V.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Simulation and Design of the Silicon Drag-Force-Gas Flowsensor Based on Piezoresistive Effect

Proceedings of IEEE Sensors
2002 | Conference paper
EID:

2-s2.0-1542361433

Contributors: Kolchuzhin, V.A.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Design features for polysilicon high pressure transducers

2001 Microwave Electronics: Measurements, Identification, Application, MEMIA 2001 - Conference Proceedings
2001 | Conference paper
EID:

2-s2.0-84959922208

Contributors: Gridchin, V.A.; Grischenko, V.V.; Lubimsky, V.M.; Shaporin, A.V.; Lee, J.H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Theoretical basis of silicon integrated flowmeter designing for small gas flow

Proceedings - 2nd Annual Siberian Russian Student Workshop on Electron Devices and Materials, SREDM 2001
2001 | Conference paper
EID:

2-s2.0-84964012146

Contributors: Kolchuzhin, V.A.; Seltz, V.V.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods

Siberian Russian Student Workshops on Electron Devices and Materials, EDM 2000
2000 | Conference paper
EID:

2-s2.0-0005279157

Contributors: Gridchin, V.A.; Shaporin, A.V.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier

Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods

Proceedings - KORUS 2000: 4th Korea-Russia International Symposium on Science and Technology
2000 | Conference paper
EID:

2-s2.0-0005377388

Contributors: Gridchin, V.A.; Shaporin, A.V.; Byalik, A.D.; Lee, J.H.
Source: Self-asserted source
Alexey Shaporin via Scopus - Elsevier
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